|
Total properties:
25
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/2004
|
Application #:
|
09821787
|
Filing Dt:
|
03/29/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/03/2002
| | | | |
|
Title:
|
VACUUM TREATMENT CHAMBER AND METHOD FOR TREATING SURFACES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/2004
|
Application #:
|
10225717
|
Filing Dt:
|
08/22/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
METHOD FOR CONTROLLING PLASMA DENSITY OR THE DISTRIBUTION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/13/2009
|
Application #:
|
10256718
|
Filing Dt:
|
09/27/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/24/2003
| | | | |
|
Title:
|
PROCEDURE AND DEVICE FOR THE PRODUCTION OF A PLASMA
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
|
Application #:
|
10334564
|
Filing Dt:
|
12/31/2002
|
|
Publication #:
|
|
Pub Dt:
|
05/29/2003
| | | | |
|
Title:
|
VACUUM TREATMENT SYSTEM AND METHOD OF MANUFACTURING SAME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/2004
|
Application #:
|
10336514
|
Filing Dt:
|
01/03/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/10/2003
| | | | |
|
Title:
|
ARRANGEMENT FOR ORIENTING THE MAGNETIZATION DIRECTION OF MAGNETIC LAYERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/21/2006
|
Application #:
|
10536204
|
Filing Dt:
|
05/24/2005
|
|
Publication #:
|
|
Pub Dt:
|
03/16/2006
| | | | |
|
Title:
|
METHOD OF PRODUCING A SUBSTRATE WITH A SURFACE TREATED BY A VACUUM TREATMENT PROCESS, USE OF SAID METHOD FOR THE PRODUCTION OF COATED WORKPIECES AND PLASMA TREATMENT CHAMBER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/15/2010
|
Application #:
|
10542075
|
Filing Dt:
|
01/23/2006
|
|
Publication #:
|
|
Pub Dt:
|
05/25/2006
| | | | |
|
Title:
|
INSTALLATION FOR PROCESSING A SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2005
|
Application #:
|
10612513
|
Filing Dt:
|
07/02/2003
|
|
Publication #:
|
|
Pub Dt:
|
03/18/2004
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ALD ON A ROTARY SUSCEPTOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2005
|
Application #:
|
10703217
|
Filing Dt:
|
11/06/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
|
Title:
|
METHOD FOR MANUFACTURING A WORKPIECE USING A MAGNETRON SPUTTER SOURCE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2014
|
Application #:
|
10952331
|
Filing Dt:
|
09/28/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/30/2006
| | | | |
|
Title:
|
METHOD FOR MANUFACTURING MAGNETRON COATED SUBSTRATES AND MAGNETRON SPUTTER SOURCE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/06/2008
|
Application #:
|
10967383
|
Filing Dt:
|
10/18/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
|
Title:
|
METHOD FOR CONTROLLING PLASMA DENSITY OR THE DISTRIBUTION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/30/2008
|
Application #:
|
11539218
|
Filing Dt:
|
10/06/2006
|
|
Publication #:
|
|
Pub Dt:
|
04/19/2007
| | | | |
|
Title:
|
METHOD FOR THE PRODUCTION OF A SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2013
|
Application #:
|
11639034
|
Filing Dt:
|
12/14/2006
|
|
Publication #:
|
|
Pub Dt:
|
06/28/2007
| | | | |
|
Title:
|
Target arrangement for mounting / dismounting and method of manufacturing
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/07/2013
|
Application #:
|
11954490
|
Filing Dt:
|
12/12/2007
|
|
Publication #:
|
|
Pub Dt:
|
06/12/2008
| | | | |
|
Title:
|
RF SUBSTRATE BIAS WITH HIGH POWER IMPULSE MAGNETRON SPUTTERING (HIPIMS)
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
|
Application #:
|
12053299
|
Filing Dt:
|
03/21/2008
|
|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
|
Title:
|
METHOD FOR CONTROLLING PLASMA DENSITY OR THE DISTRIBUTION THEREOF
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2014
|
Application #:
|
12256543
|
Filing Dt:
|
10/23/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/30/2009
| | | | |
|
Title:
|
METHOD FOR MANUFACTURING WORKPIECES AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2013
|
Application #:
|
12257570
|
Filing Dt:
|
10/24/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/30/2009
| | | | |
|
Title:
|
APPLICATION OF HIPIMS TO THROUGH SILICON VIA METALLIZATION IN THREE-DIMENSIONAL WAFER PACKAGING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/24/2013
|
Application #:
|
12315608
|
Filing Dt:
|
12/04/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/11/2009
| | | | |
|
Title:
|
Procedure and device for the production of a plasma
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/18/2012
|
Application #:
|
12644596
|
Filing Dt:
|
12/22/2009
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
|
Title:
|
RF SPUTTERING ARRANGEMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/23/2013
|
Application #:
|
12848746
|
Filing Dt:
|
08/02/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/16/2010
| | | | |
|
Title:
|
TRANSPORT METHOD FOR DISK-SHAPED WORKPIECES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/11/2012
|
Application #:
|
13011109
|
Filing Dt:
|
01/21/2011
|
|
Publication #:
|
|
Pub Dt:
|
07/21/2011
| | | | |
|
Title:
|
PROCESS FOR THE DEPOSITION OF AN ANTI-REFLECTION FILM ON A SUBSTRATE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/15/2015
|
Application #:
|
13256979
|
Filing Dt:
|
09/16/2011
|
|
Publication #:
|
|
Pub Dt:
|
01/12/2012
| | | | |
|
Title:
|
METHOD OF INLINE MANUFACTURING A SOLAR CELL PANEL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/28/2014
|
Application #:
|
13257001
|
Filing Dt:
|
09/16/2011
|
|
Publication #:
|
|
Pub Dt:
|
01/05/2012
| | | | |
|
Title:
|
VACUUM TREATMENT APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/29/2015
|
Application #:
|
13701591
|
Filing Dt:
|
02/05/2013
|
|
Publication #:
|
|
Pub Dt:
|
05/30/2013
| | | | |
|
Title:
|
VACUUM PROCESSING DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/02/2016
|
Application #:
|
13997801
|
Filing Dt:
|
06/25/2013
|
|
Publication #:
|
|
Pub Dt:
|
10/31/2013
| | | | |
|
Title:
|
VACUUM TREATMENT APPARATUS AND A METHOD FOR MANUFACTURING
|
|
