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Reel/Frame:047789/0811   Pages: 7
Recorded: 12/17/2018
Attorney Dkt #:30623-0061003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/03/2020
Application #:
16220212
Filing Dt:
12/14/2018
Publication #:
Pub Dt:
04/25/2019
Title:
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM COMPRISING SUCH AN ILLUMINATION OPTICAL UNIT
Assignors
1
Exec Dt:
07/03/2014
2
Exec Dt:
07/03/2014
3
Exec Dt:
07/16/2014
4
Exec Dt:
07/04/2014
Assignee
1
CARL-ZEISS-PROMENADE 10
JENA, GERMANY 07745
Correspondence name and address
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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