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Patent Assignment Details
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Reel/Frame:011997/0816   Pages: 4
Recorded: 07/12/2001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/15/2003
Application #:
09905749
Filing Dt:
07/12/2001
Publication #:
Pub Dt:
03/20/2003
Title:
METHOD OF MONITORING THIN-FILM PROCESSES AND METROLOGY TOOL THEREOF
Assignors
1
Exec Dt:
06/27/2001
2
Exec Dt:
06/27/2001
3
Exec Dt:
06/27/2001
4
Exec Dt:
06/27/2001
Assignee
1
3150 DE LA CRUZ BLVD., SUITE 105
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
MAREK ALBOSZTA
LUMEN
45 CABOT AVENUE, SUITE 110
SANTA CLARA, CA 95051

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