Total properties:
71
|
|
Patent #:
|
|
Issue Dt:
|
03/21/1995
|
Application #:
|
08153608
|
Filing Dt:
|
11/16/1993
|
Title:
|
PLASMA GENERATING DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/02/1997
|
Application #:
|
08237432
|
Filing Dt:
|
05/03/1994
|
Title:
|
METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
05/14/1996
|
Application #:
|
08237575
|
Filing Dt:
|
05/03/1994
|
Title:
|
PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/1998
|
Application #:
|
08573257
|
Filing Dt:
|
12/15/1995
|
Title:
|
FIELD EMISSION DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/22/1998
|
Application #:
|
08576236
|
Filing Dt:
|
12/21/1995
|
Title:
|
HEATING SYSTEM, VACUUM PROCESS CHAMBER COMPRISING SUCH A HEATING SYSTEM AND OPERATION OF SUCH A VACUUM PROCESS CHAMBER
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/1997
|
Application #:
|
08693987
|
Filing Dt:
|
08/08/1996
|
Title:
|
VACUUM APPARATUS FOR THE SURFACE TREATMENT OF WORKPIECES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/13/2000
|
Application #:
|
08881759
|
Filing Dt:
|
06/24/1997
|
Title:
|
METHOD FOR MONITORING THE FLOW OF A GAS INTO A VACUUM REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
07/25/2000
|
Application #:
|
09026446
|
Filing Dt:
|
02/19/1998
|
Title:
|
MAGNETRON SPUTTERING SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2000
|
Application #:
|
09066978
|
Filing Dt:
|
04/28/1998
|
Title:
|
PROCESS FOR DRY ETCHING AND VACUUM TREATMENT REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2001
|
Application #:
|
09177894
|
Filing Dt:
|
10/23/1998
|
Title:
|
PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATION SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
08/28/2001
|
Application #:
|
09360247
|
Filing Dt:
|
07/23/1999
|
Title:
|
CAPACITIVELY COUPLED RF-PLASMA REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
|
Application #:
|
09379742
|
Filing Dt:
|
08/24/1999
|
Publication #:
|
|
Pub Dt:
|
06/14/2001
| | | | |
Title:
|
METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2001
|
Application #:
|
09401158
|
Filing Dt:
|
09/22/1999
|
Title:
|
PLASMA REACTOR FORTHE TREATMENT OF LARGE SIZE SUBTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
01/23/2001
|
Application #:
|
09441373
|
Filing Dt:
|
11/17/1999
|
Title:
|
PROCESS FOR HANDLING WORKPIECES AND APPARATUS THEREFOR
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/2002
|
Application #:
|
09441374
|
Filing Dt:
|
11/17/1999
|
Title:
|
PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
02/04/2003
|
Application #:
|
09481392
|
Filing Dt:
|
01/12/2000
|
Title:
|
HEAT CONDITIONING PROCESS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/2003
|
Application #:
|
09559408
|
Filing Dt:
|
04/26/2000
|
Title:
|
DESING OF GAS INJECTION FOR THE ELECTRODE IN A CAPACITIVELY COUPLED RF PLASMA REACTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
09/04/2001
|
Application #:
|
09587543
|
Filing Dt:
|
06/05/2000
|
Title:
|
METHOD OF PRODUCING FLAT PANELS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/06/2002
|
Application #:
|
09632847
|
Filing Dt:
|
08/04/2000
|
Title:
|
VACUUM SYSTEM WITH A VACUUM PLATE VALVE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/10/2005
|
Application #:
|
09766835
|
Filing Dt:
|
01/23/2001
|
Publication #:
|
|
Pub Dt:
|
12/13/2001
| | | | |
Title:
|
PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
09/24/2002
|
Application #:
|
09888923
|
Filing Dt:
|
06/25/2001
|
Publication #:
|
|
Pub Dt:
|
03/28/2002
| | | | |
Title:
|
MAGNETRON SPUTTERING SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
01/06/2004
|
Application #:
|
09925646
|
Filing Dt:
|
08/10/2001
|
Publication #:
|
|
Pub Dt:
|
03/07/2002
| | | | |
Title:
|
PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
10236636
|
Filing Dt:
|
09/06/2002
|
Publication #:
|
|
Pub Dt:
|
04/03/2003
| | | | |
Title:
|
METHOD OF PRODUCING FLAT PANELS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/11/2007
|
Application #:
|
10300873
|
Filing Dt:
|
11/21/2002
|
Publication #:
|
|
Pub Dt:
|
04/17/2003
| | | | |
Title:
|
AN RF PLASMA REACTOR HAVING A DISTRIBUTION CHAMBER WITH AT LEAST ONE GRID
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2010
|
Application #:
|
10484174
|
Filing Dt:
|
06/21/2004
|
Publication #:
|
|
Pub Dt:
|
12/09/2004
| | | | |
Title:
|
LIFTING AND SUPPORTING DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2008
|
Application #:
|
10691102
|
Filing Dt:
|
10/22/2003
|
Publication #:
|
|
Pub Dt:
|
07/15/2004
| | | | |
Title:
|
METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
07/17/2007
|
Application #:
|
10713339
|
Filing Dt:
|
11/14/2003
|
Publication #:
|
|
Pub Dt:
|
06/17/2004
| | | | |
Title:
|
APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2008
|
Application #:
|
10835708
|
Filing Dt:
|
04/30/2004
|
Publication #:
|
|
Pub Dt:
|
11/03/2005
| | | | |
Title:
|
METHOD FOR MANUFACTURING A PLATE-SHAPED WORKPIECE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/29/2009
|
Application #:
|
10898458
|
Filing Dt:
|
07/23/2004
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
Title:
|
METHOD OF MANUFACTURING VACUUM PLASMA TREATED WORKPIECES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
|
Application #:
|
10912365
|
Filing Dt:
|
07/23/2004
|
Publication #:
|
|
Pub Dt:
|
02/17/2005
| | | | |
Title:
|
SLIDING ANODE MAGNETRON SPUTTERING SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/10/2009
|
Application #:
|
10935779
|
Filing Dt:
|
09/08/2004
|
Publication #:
|
|
Pub Dt:
|
03/31/2005
| | | | |
Title:
|
VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
02/17/2009
|
Application #:
|
11061143
|
Filing Dt:
|
02/18/2005
|
Publication #:
|
|
Pub Dt:
|
09/08/2005
| | | | |
Title:
|
DIFFUSION BARRIER LAYER AND METHOD FOR MANUFACTURING A DIFFUSION BARRIER LAYER
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11137230
|
Filing Dt:
|
05/25/2005
|
Publication #:
|
|
Pub Dt:
|
01/26/2006
| | | | |
Title:
|
Supporting and lifting device for substrates in vacuum
|
|
|
Patent #:
|
|
Issue Dt:
|
01/11/2011
|
Application #:
|
11279152
|
Filing Dt:
|
04/10/2006
|
Publication #:
|
|
Pub Dt:
|
10/12/2006
| | | | |
Title:
|
SOLAR CELL MODULE AND METHOD OF ENCAPSULATING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
04/07/2009
|
Application #:
|
11427048
|
Filing Dt:
|
06/28/2006
|
Publication #:
|
|
Pub Dt:
|
01/04/2007
| | | | |
Title:
|
METHOD FOR MANUFACTURING FLAT SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2014
|
Application #:
|
11573162
|
Filing Dt:
|
06/14/2007
|
Publication #:
|
|
Pub Dt:
|
11/01/2007
| | | | |
Title:
|
Adhesion Layer for Thin Film Transistors
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/2011
|
Application #:
|
11577576
|
Filing Dt:
|
05/11/2007
|
Publication #:
|
|
Pub Dt:
|
11/15/2007
| | | | |
Title:
|
MAGNETRON SPUTTERING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
07/22/2014
|
Application #:
|
11597856
|
Filing Dt:
|
06/04/2007
|
Publication #:
|
|
Pub Dt:
|
10/04/2007
| | | | |
Title:
|
Table for Receiving a Workpiece and Method for Processing a Workpiece on Such Table
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11615268
|
Filing Dt:
|
12/22/2006
|
Publication #:
|
|
Pub Dt:
|
08/02/2007
| | | | |
Title:
|
METHOD OF MANUFACTURING AT LEAST ONE SPUTTER-COATED SUBSTRATE AND SPUTTER SOURCE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/25/2012
|
Application #:
|
11638176
|
Filing Dt:
|
12/13/2006
|
Publication #:
|
|
Pub Dt:
|
08/02/2007
| | | | |
Title:
|
SPUTTER TARGET UTILIZATION
|
|
|
Patent #:
|
|
Issue Dt:
|
02/16/2010
|
Application #:
|
11691593
|
Filing Dt:
|
03/27/2007
|
Publication #:
|
|
Pub Dt:
|
12/13/2007
| | | | |
Title:
|
PLASMA REACTOR FOR THE TREATMENT OF LARGE SIZE SUBSTRATES
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11719115
|
Filing Dt:
|
07/06/2007
|
Publication #:
|
|
Pub Dt:
|
11/01/2007
| | | | |
Title:
|
Capacitively Coupled Rf-Plasma Reactor
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11720034
|
Filing Dt:
|
09/14/2007
|
Publication #:
|
|
Pub Dt:
|
02/28/2008
| | | | |
Title:
|
Vacuum Processing Chamber for Very Large Area Substrates
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11755423
|
Filing Dt:
|
05/30/2007
|
Publication #:
|
|
Pub Dt:
|
02/14/2008
| | | | |
Title:
|
APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2010
|
Application #:
|
11872957
|
Filing Dt:
|
10/16/2007
|
Publication #:
|
|
Pub Dt:
|
08/07/2008
| | | | |
Title:
|
PLASMA REACTOR FOR THE TREATMENT OF LARGE SIZE SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/02/2015
|
Application #:
|
11877419
|
Filing Dt:
|
10/23/2007
|
Publication #:
|
|
Pub Dt:
|
04/24/2008
| | | | |
Title:
|
RF Plasma Reactor Having a Distribution Chamber with at Least One Grid
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/2009
|
Application #:
|
11947245
|
Filing Dt:
|
11/29/2007
|
Publication #:
|
|
Pub Dt:
|
03/27/2008
| | | | |
Title:
|
METHOD FOR PRODUCING SEMI-CONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12040292
|
Filing Dt:
|
02/29/2008
|
Publication #:
|
|
Pub Dt:
|
09/04/2008
| | | | |
Title:
|
INLINE VACUUM PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES THEREIN
|
|
|
Patent #:
|
|
Issue Dt:
|
06/30/2009
|
Application #:
|
12105331
|
Filing Dt:
|
04/18/2008
|
Publication #:
|
|
Pub Dt:
|
10/23/2008
| | | | |
Title:
|
TEST EQUIPMENT FOR AUTOMATED QUALITY CONTROL OF THIN FILM SOLAR MODULES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/26/2012
|
Application #:
|
12235845
|
Filing Dt:
|
09/23/2008
|
Publication #:
|
|
Pub Dt:
|
01/29/2009
| | | | |
Title:
|
VACUUM TREATMENT INSTALLATION FOR THE PRODUCTION OF A DISK-SHAPED WORKPIECE BASED ON A DIELECTRIC SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
03/30/2010
|
Application #:
|
12346917
|
Filing Dt:
|
12/31/2008
|
Publication #:
|
|
Pub Dt:
|
06/18/2009
| | | | |
Title:
|
VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2011
|
Application #:
|
12372813
|
Filing Dt:
|
02/18/2009
|
Publication #:
|
|
Pub Dt:
|
06/18/2009
| | | | |
Title:
|
METHOD FOR MANUFACTURING FLAT SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2014
|
Application #:
|
12502615
|
Filing Dt:
|
07/14/2009
|
Publication #:
|
|
Pub Dt:
|
01/21/2010
| | | | |
Title:
|
COVER FOR A ROLLER
|
|
|
Patent #:
|
|
Issue Dt:
|
07/02/2013
|
Application #:
|
12675190
|
Filing Dt:
|
02/25/2010
|
Publication #:
|
|
Pub Dt:
|
08/04/2011
| | | | |
Title:
|
METHOD FOR MANUFACTURING AND SCRIBING A THIN-FILM SOLAR CELL
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2014
|
Application #:
|
12680239
|
Filing Dt:
|
05/14/2010
|
Publication #:
|
|
Pub Dt:
|
07/07/2011
| | | | |
Title:
|
DEPOSITION OF ACTIVE FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/15/2011
|
Application #:
|
12708757
|
Filing Dt:
|
02/19/2010
|
Publication #:
|
|
Pub Dt:
|
06/10/2010
| | | | |
Title:
|
VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2013
|
Application #:
|
12808192
|
Filing Dt:
|
06/15/2010
|
Publication #:
|
|
Pub Dt:
|
10/21/2010
| | | | |
Title:
|
METHOD FOR MANUFACTURING LARGE-AREA VACUUM PLASMA TREATED SUBSTRATES AND VACUUM PLASMA TREATMENT APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/2015
|
Application #:
|
12808200
|
Filing Dt:
|
08/26/2010
|
Publication #:
|
|
Pub Dt:
|
12/16/2010
| | | | |
Title:
|
METHOD FOR OBTAINING HIGH PERFORMANCE THIN FILM DEVICES DEPOSITED ON HIGHLY TEXTURED SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/2013
|
Application #:
|
12808337
|
Filing Dt:
|
07/22/2010
|
Publication #:
|
|
Pub Dt:
|
12/02/2010
| | | | |
Title:
|
GATE VALVE FOR A VACUUM CHAMBER AND VACUUM CHAMBER
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12933205
|
Filing Dt:
|
12/07/2010
|
Publication #:
|
|
Pub Dt:
|
11/24/2011
| | | | |
Title:
|
PHOTOVOLTAIC CELL AND METHODS FOR PRODUCING A PHOTOVOLTAIC CELL
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12988004
|
Filing Dt:
|
10/15/2010
|
Publication #:
|
|
Pub Dt:
|
02/10/2011
| | | | |
Title:
|
PHOTOVOLTAIC DEVICE AND METHOD OF MANUFACTURING A PHOTOVOLTAIC DEVICE
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12988059
|
Filing Dt:
|
04/01/2011
|
Publication #:
|
|
Pub Dt:
|
07/21/2011
| | | | |
Title:
|
ASSEMBLY LINE FOR PHOTOVOLTAIC DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2013
|
Application #:
|
12989967
|
Filing Dt:
|
10/28/2010
|
Publication #:
|
|
Pub Dt:
|
03/03/2011
| | | | |
Title:
|
PLASMA TREATMENT APPARATUS AND METHOD FOR PLASMA-ASSISTED TREATMENT OF SUBSTRATES
|
|
|
Patent #:
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Issue Dt:
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05/28/2013
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Application #:
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12999236
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Filing Dt:
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12/15/2010
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Publication #:
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Pub Dt:
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05/12/2011
| | | | |
Title:
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METHOD FOR LARGE-SCALE MANUFACTURING OF PHOTOVOLTAIC CELLS FOR A CONVERTER PANEL AND PHOTOVOLTAIC CONVERTER PANEL
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Patent #:
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NONE
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Issue Dt:
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|
Application #:
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13002572
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Filing Dt:
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04/21/2011
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Publication #:
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Pub Dt:
|
08/25/2011
| | | | |
Title:
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REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD
|
|
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Patent #:
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NONE
|
Issue Dt:
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|
Application #:
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13056136
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Filing Dt:
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01/27/2011
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Publication #:
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Pub Dt:
|
06/02/2011
| | | | |
Title:
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METHOD FOR MANUFACTURING A PHOTOVOLTAIC CELL STRUCTURE
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
13059265
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Filing Dt:
|
04/06/2011
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Publication #:
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Pub Dt:
|
07/28/2011
| | | | |
Title:
|
PHOTOVOLTAIC CELL AND METHOD OF MANUFACTURING A PHOTOVOLTAIC CELL
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
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13059685
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Filing Dt:
|
02/18/2011
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Publication #:
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|
Pub Dt:
|
07/28/2011
| | | | |
Title:
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ELECTRICAL AND OPTICAL PROPERTIES OF SILICON SOLAR CELLS
|
|
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Patent #:
|
|
Issue Dt:
|
02/18/2014
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Application #:
|
13060345
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Filing Dt:
|
04/20/2011
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Publication #:
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|
Pub Dt:
|
08/04/2011
| | | | |
Title:
|
METHOD FOR DEPOSITING AN AMORPHOUS SILICON FILM FOR PHOTOVOLTAIC DEVICES WITH REDUCED LIGHT-INDUCED DEGRADATION FOR IMPROVED STABILIZED PERFORMANCE
|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
13128265
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Filing Dt:
|
05/09/2011
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Publication #:
|
|
Pub Dt:
|
11/10/2011
| | | | |
Title:
|
PLASMA PROCESSING APPARATUS AND METHOD FOR THE PLASMA PROCESSING OF SUBSTRATES
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13914933
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Filing Dt:
|
06/11/2013
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Publication #:
|
|
Pub Dt:
|
10/17/2013
| | | | |
Title:
|
METHOD FOR MANUFACTURING AND SCRIBING A THIN-FILM SOLAR CELL
|
|