Patent Assignment Details
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Reel/Frame: | 013469/0824 | |
| Pages: | 4 |
| | Recorded: | 11/05/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10289005
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Filing Dt:
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11/05/2002
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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METHOD AND SYSTEM FOR DETECTING PHASE DEFECTS IN LITHOGRAPHIC MASKS AND SEMICONDUCTOR WAFERS
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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RUSSELL N. SWERDON
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P.O. BOX 778
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BERKELEY, CA 94704-0778
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