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Reel/Frame:013469/0824   Pages: 4
Recorded: 11/05/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/27/2004
Application #:
10289005
Filing Dt:
11/05/2002
Publication #:
Pub Dt:
01/29/2004
Title:
METHOD AND SYSTEM FOR DETECTING PHASE DEFECTS IN LITHOGRAPHIC MASKS AND SEMICONDUCTOR WAFERS
Assignors
1
Exec Dt:
11/01/2002
2
Exec Dt:
11/01/2002
3
Exec Dt:
11/01/2002
4
Exec Dt:
11/01/2002
Assignee
1
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondence name and address
BEYER WEAVER & THOMAS, LLP
RUSSELL N. SWERDON
P.O. BOX 778
BERKELEY, CA 94704-0778

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