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Patent Assignment Details
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Reel/Frame:015581/0827   Pages: 4
Recorded: 07/19/2004
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/12/2008
Application #:
10755846
Filing Dt:
01/12/2004
Publication #:
Pub Dt:
12/23/2004
Title:
EUV ILLUMINATION SYSTEM HAVING A PLURALITY OF LIGHT SOURCES FOR ILLUMINATING AN OPTICAL ELEMENT
Assignors
1
Exec Dt:
03/23/2004
2
Exec Dt:
05/12/2004
3
Exec Dt:
04/05/2004
4
Exec Dt:
05/21/2004
5
Exec Dt:
03/23/2004
Assignee
1
CARL-ZEISS-STRASSE 22
OBERKOCHEN, GERMANY 73447
Correspondence name and address
OHLANDT, GREELEY, RUGGIERO ET AL.
CHARLES N.J. RUGGIERO, ESQ.
ONE LANDMARK SQUARE, 10TH FLOOR
STAMFORD, CT 06901-2682

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