Patent Assignment Details
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| Reel/Frame: | 009470/0832 | |
| Pages: | 4 |
| | Recorded: | 09/08/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08942757
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Filing Dt:
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10/02/1997
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Title:
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METHOD AND APPARATUS FOR X-RAY AND EXTREME ULTRAVIOLET INSPECTION OF LITHOGRAPHY MASKS AND OTHER OBJECTS
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Assignee
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| NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY |
| 14TH AND CONSTITUTION |
| WASHINGTON, DISTRICT OF COLUMBIA 20230 |
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Correspondence name and address
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NATIONAL INSTITUTE OF STANDARDS AND
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TECHNOLOGY
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BRENDA J. GRAY, PATENT ASSISTANT
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BUILDING 820, ROOM 213
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GAITHERSBURG, MD 20899
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