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Reel/Frame:065602/0835   Pages: 7
Recorded: 11/17/2023
Attorney Dkt #:38294UY
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
18511594
Filing Dt:
11/16/2023
Publication #:
Pub Dt:
03/14/2024
Title:
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM
Assignors
1
Exec Dt:
09/01/2020
2
Exec Dt:
09/02/2020
Assignee
1
3-1 AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondence name and address
NATH, GOLDBERG & MEYER
112 S WEST STREET
38294UY_JLM_HJ
ALEXANDRIA, VA 22314

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