Patent Assignment Details
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Reel/Frame: | 015549/0847 | |
| Pages: | 2 |
| | Recorded: | 01/11/2005 | | |
Conveyance: | TERMINATION CERTIFICATION |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/10/2007
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Application #:
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10853558
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Filing Dt:
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05/26/2004
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Publication #:
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Pub Dt:
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12/01/2005
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Title:
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SYSTEM AND METHOD UTILIZING A LITHOGRAPHY TOOL HAVING MODULAR ILLUMINATION, PATTERN GENERATOR, AND PROJECTION OPTICS PORTIONS
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Assignee
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL - 5504 DR |
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Correspondence name and address
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STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
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1100 NEW YORK AVE., NW
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WASHINGTON, DC 20005
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