Patent Assignment Details
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| Reel/Frame: | 038714/0855 | |
| Pages: | 7 |
| | Recorded: | 05/25/2016 | | |
| Attorney Dkt #: | 5649-4490 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/21/2017
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Application #:
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15163876
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Filing Dt:
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05/25/2016
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Publication #:
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Pub Dt:
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03/09/2017
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Title:
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MICROWAVE PROBE, PLASMA MONITORING SYSTEM INCLUDING THE MICROWAVE PROBE, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SYSTEM
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Assignee
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| 129, SAMSUNG-RO |
| YEONGTONG-GU, GYEONGGI-DO |
| SUWON-SI, KOREA, REPUBLIC OF 16677 |
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Correspondence name and address
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MYERS BIGEL & SIBLEY, P.A.
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PO BOX 37428
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RALEIGH, NC 27627
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