Patent Assignment Details
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Reel/Frame: | 043615/0863 | |
| Pages: | 3 |
| | Recorded: | 09/18/2017 | | |
Attorney Dkt #: | EATNP355US |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/13/2018
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Application #:
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15707473
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Filing Dt:
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09/18/2017
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Title:
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WAFER TEMPERATURE CONTROL WITH CONSIDERATION TO BEAM POWER INPUT
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Assignee
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108 CHERRY HILL DRIVE |
BEVERLY, MASSACHUSETTS 01915 |
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Correspondence name and address
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ESCHWEILER & POTASHNIK, LLC
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ROSETTA CENTER
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629 EUCLID AVE., SUITE 1000
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CLEVELAND, OH 44114
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