Patent Assignment Details
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| Reel/Frame: | 051274/0878 | |
| Pages: | 4 |
| | Recorded: | 12/13/2019 | | |
| Attorney Dkt #: | E000202 US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/26/2022
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Application #:
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16713381
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Filing Dt:
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12/13/2019
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Publication #:
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Pub Dt:
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06/18/2020
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Title:
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FLUORINE ION IMPLANTATION METHOD AND SYSTEM
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Assignee
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| 129 CONCORD ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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ENTEGRIS, INC.
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129 CONCORD ROAD, BUILDING 2
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BILLERICA, MA 01821
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