Patent Assignment Details
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Reel/Frame: | 013082/0883 | |
| Pages: | 3 |
| | Recorded: | 07/02/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/04/2005
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Application #:
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10187705
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Filing Dt:
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07/02/2002
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Title:
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NOVEL DEVELOPMENT HASTENED STABILITY OF TITANIUM NITRIDE FOR APM ETCHING RATE MONITOR
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Assignee
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SCIENCE-BASED INDUSTRIAL PARK |
121 PARK AVENUE 3 |
SHIN-CHU R.O.C., TAIWAN |
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Correspondence name and address
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GEORGE O. SAILE
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20 MCINTOSH DRIVE
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POUGHKEEPSIE, NY 12603
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