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Reel/Frame:017127/0888   Pages: 3
Recorded: 10/21/2005
Attorney Dkt #:263735us26
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/13/2010
Application #:
11254668
Filing Dt:
10/21/2005
Publication #:
Pub Dt:
05/18/2006
Title:
SUBSTRATE PROCESSING APPARATUS, PROGRAM FOR PERFORMING OPERATION AND CONTROL METHOD THEREOF, AND COMPUTER READABLE STORAGE MEDIUM STORING THE PROGRAM
Assignors
1
Exec Dt:
10/11/2005
2
Exec Dt:
10/11/2005
3
Exec Dt:
10/11/2005
4
Exec Dt:
10/11/2005
5
Exec Dt:
10/11/2005
6
Exec Dt:
10/11/2005
7
Exec Dt:
10/11/2005
Assignee
1
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-8481, JAPAN
Correspondence name and address
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUSTADT
1940 DUKE STREET
ALEXANDRIA, VA 22314

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