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Reel/Frame:018976/0888   Pages: 4
Recorded: 02/23/2007
Attorney Dkt #:081468-0359400
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
03/29/2011
Application #:
11653441
Filing Dt:
01/16/2007
Publication #:
Pub Dt:
07/17/2008
Title:
INSPECTION METHOD AND APPARATUS,LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND DEVICE MANUFACTURING METHOD
Assignors
1
Exec Dt:
02/09/2007
2
Exec Dt:
02/09/2007
3
Exec Dt:
02/08/2007
4
Exec Dt:
02/09/2007
5
Exec Dt:
02/08/2007
Assignee
1
DE RUN 6501, NL-5504 DR
VELDHOVEN, NETHERLANDS
Correspondence name and address
PILLSBURY WINTHROP SHAW PITTMAN LLP
P.O. BOX 10500
1650 TYSONS BOULEVARD
MCLEAN, VA 22102

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