Total properties:
14
|
|
Patent #:
|
|
Issue Dt:
|
07/03/2001
|
Application #:
|
09150669
|
Filing Dt:
|
09/10/1998
|
Title:
|
ELECTROSTATIC CHUCKS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2001
|
Application #:
|
09414717
|
Filing Dt:
|
10/12/1999
|
Title:
|
APPARATUS AND METHODS FOR SPUTTERING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/09/2003
|
Application #:
|
09477819
|
Filing Dt:
|
01/05/2000
|
Publication #:
|
|
Pub Dt:
|
01/03/2002
| | | | |
Title:
|
SPUTTERING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/14/2004
|
Application #:
|
09548014
|
Filing Dt:
|
04/12/2000
|
Publication #:
|
|
Pub Dt:
|
09/19/2002
| | | | |
Title:
|
METHOD AND DEPOSITING A LAYER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
|
Application #:
|
09568987
|
Filing Dt:
|
05/11/2000
|
Title:
|
DEPOSITION APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/17/2002
|
Application #:
|
09673081
|
Filing Dt:
|
03/29/2001
|
Title:
|
INDUCTIVE COIL ASSEMBLY HAVING MULTIPLE COIL SEGMENTS FOR PLASMA PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/11/2002
|
Application #:
|
09704714
|
Filing Dt:
|
11/03/2000
|
Title:
|
METHOD OF FORMING A BARRIER LAYER
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2003
|
Application #:
|
09834880
|
Filing Dt:
|
04/16/2001
|
Publication #:
|
|
Pub Dt:
|
10/25/2001
| | | | |
Title:
|
METHOD OF COOLING AN INDUCTION COIL
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/2005
|
Application #:
|
10182869
|
Filing Dt:
|
08/01/2002
|
Publication #:
|
|
Pub Dt:
|
01/02/2003
| | | | |
Title:
|
ELECTROSTATIC CLAMPING
|
|
|
Patent #:
|
|
Issue Dt:
|
08/16/2005
|
Application #:
|
10242762
|
Filing Dt:
|
09/13/2002
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
Title:
|
METHODS OF FORMING NITRIDE FILMS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/23/2005
|
Application #:
|
10290283
|
Filing Dt:
|
11/08/2002
|
Publication #:
|
|
Pub Dt:
|
05/15/2003
| | | | |
Title:
|
METHOD OF FORMING A PATTERNED METAL LAYER
|
|
|
Patent #:
|
|
Issue Dt:
|
04/05/2005
|
Application #:
|
10419113
|
Filing Dt:
|
04/21/2003
|
Publication #:
|
|
Pub Dt:
|
10/30/2003
| | | | |
Title:
|
PLASMA PROCESSING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/27/2005
|
Application #:
|
10464468
|
Filing Dt:
|
06/19/2003
|
Publication #:
|
|
Pub Dt:
|
01/08/2004
| | | | |
Title:
|
DEPOSITION METHODS AND APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/31/2006
|
Application #:
|
10483805
|
Filing Dt:
|
09/15/2004
|
Publication #:
|
|
Pub Dt:
|
03/03/2005
| | | | |
Title:
|
DEPOSITING A TANTALUM FILM
|
|