Patent Assignment Details
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Reel/Frame: | 009036/0899 | |
| Pages: | 5 |
| | Recorded: | 03/12/1998 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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08984652
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Filing Dt:
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12/03/1997
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Title:
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HEATING ELEMENT FOR HEATING THE EDGES OF WAFERS IN THERMAL PROCESSING CHAMBERS
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Assignee
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4425 FORTRAN DRIVE |
SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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TIMOTHY A. CASSIDY
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700 EAST NORTH STREET
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SUITE 15
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GREENVILLE, SC 29601
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