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Total properties:
39
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Patent #:
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Issue Dt:
|
06/16/1987
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Application #:
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06707262
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Filing Dt:
|
03/01/1985
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Title:
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FLUIDIZED BED HEATER FOR SEMICONDUCTOR PROCESSING
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Patent #:
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Issue Dt:
|
07/04/1989
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Application #:
|
07068727
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Filing Dt:
|
06/29/1987
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Title:
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LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF SILICON DIOXIDE FILMS
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Patent #:
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Issue Dt:
|
11/29/1988
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Application #:
|
07089591
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Filing Dt:
|
08/26/1987
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Title:
|
INDUSTRIAL ROBOT FOR USE IN CLEAN ROOM ENVIRONMENT
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Patent #:
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Issue Dt:
|
05/30/1989
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Application #:
|
07114326
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Filing Dt:
|
10/27/1987
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Title:
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CVD REACTOR AND GAS INJECTION SYSTEM
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Patent #:
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Issue Dt:
|
05/30/1989
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Application #:
|
07128806
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Filing Dt:
|
12/04/1987
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Title:
|
ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD
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Patent #:
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Issue Dt:
|
02/18/1992
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Application #:
|
07176711
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Filing Dt:
|
04/01/1988
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Title:
|
BASEBALL BAT WITH OVAL HANDLE
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Patent #:
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Issue Dt:
|
01/02/1990
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Application #:
|
07214909
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Filing Dt:
|
06/29/1988
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Title:
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PROCESS FOR BOROSILICATE GLASS FILMS FOR MULTILEVEL METALLIZATION STRUCTURES IN SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
|
05/19/1992
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Application #:
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07513807
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Filing Dt:
|
04/24/1990
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Title:
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SELF CLEANING FLOW CONTROL ORIFICE
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|
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Patent #:
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Issue Dt:
|
08/11/1992
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Application #:
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07542243
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Filing Dt:
|
06/21/1990
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Title:
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INJECTOR AND METHOD FOR DELIVERING GASEOUS CHEMICALS TO A SURFACE
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|
|
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Patent #:
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|
Issue Dt:
|
01/07/1992
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Application #:
|
07601270
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Filing Dt:
|
10/22/1990
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|
Title:
|
LIQUID SOURCE BUBBLER
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|
|
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Patent #:
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|
Issue Dt:
|
07/09/1991
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Application #:
|
07601408
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Filing Dt:
|
10/23/1990
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Title:
|
LIQUID LEVEL SENSOR ASSEMBLY
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|
|
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Patent #:
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|
Issue Dt:
|
12/27/1994
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Application #:
|
07971490
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Filing Dt:
|
11/04/1992
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|
Title:
|
GAS HEATER FOR PROCESSING GASES
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|
|
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Patent #:
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|
Issue Dt:
|
04/19/1994
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Application #:
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08071516
|
Filing Dt:
|
06/03/1993
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|
Title:
|
CHEMICAL VAPOR DEPOSITION OF SILICON DIOXIDE USING HEXAMETHYLDISILAZANE
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|
|
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Patent #:
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|
Issue Dt:
|
11/05/1996
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Application #:
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08386647
|
Filing Dt:
|
02/10/1995
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|
Title:
|
METHOD OF FORMING A FLUORINATED SILICON OXIDE LAYER USIING PLASMA CHEMICAL VAPOR DEPOSITION
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|
|
|
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Patent #:
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|
Issue Dt:
|
09/16/1997
|
Application #:
|
08447809
|
Filing Dt:
|
05/23/1995
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|
Title:
|
METHOD OF PLANARIZING A LAYER OF MATERIAL
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|
|
|
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Patent #:
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|
Issue Dt:
|
01/13/1998
|
Application #:
|
08500480
|
Filing Dt:
|
07/10/1995
|
|
Title:
|
ELECTROSTATIC CHUCK ASSEMBLY
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/04/1997
|
Application #:
|
08621772
|
Filing Dt:
|
03/22/1996
|
|
Title:
|
SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
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|
|
|
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Patent #:
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|
Issue Dt:
|
07/20/1999
|
Application #:
|
08679864
|
Filing Dt:
|
07/16/1996
|
|
Title:
|
METHOD FOR PREPARING CROSSEDLINKED AROMATIC POLYMERS AS LOW K DI- ELECTRICS
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|
|
|
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Patent #:
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|
Issue Dt:
|
07/28/1998
|
Application #:
|
08704227
|
Filing Dt:
|
08/27/1996
|
|
Title:
|
METHOD OF STRESS-RELIEVING SILICON OXIDE FILMS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
07/13/1999
|
Application #:
|
08796300
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Filing Dt:
|
02/07/1997
|
|
Title:
|
DIRECT DRIVE ROTATIONAL MOTOR WITH AXIAL VACUUM
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|
|
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|
Patent #:
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|
Issue Dt:
|
01/05/1999
|
Application #:
|
08801997
|
Filing Dt:
|
02/18/1997
|
|
Title:
|
OPTIMIZATION OF SIO2 FILM CONFORMALITY IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION
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|
|
|
|
Patent #:
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|
Issue Dt:
|
06/29/1999
|
Application #:
|
08823655
|
Filing Dt:
|
03/11/1997
|
|
Title:
|
METHOD OF REDUCING METAL CONTAMINATION DURING SEMICONDUCTOR PROCESSING IN A REACTOR HAVING METAL COMPONENTS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/17/1999
|
Application #:
|
08838882
|
Filing Dt:
|
04/14/1997
|
|
Title:
|
EXHAUST VENT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/13/1999
|
Application #:
|
08865330
|
Filing Dt:
|
05/29/1997
|
|
Title:
|
METHOD AND APPARATUS FOR CLAMPING A SUBSTRATE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/1999
|
Application #:
|
08868041
|
Filing Dt:
|
06/03/1997
|
|
Title:
|
ELECTROSTATIC SUPPORT ASSEMBLY HAVING AN INTEGRAL ION FOCUS RING
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/17/1998
|
Application #:
|
08883366
|
Filing Dt:
|
06/26/1997
|
|
Title:
|
ELECTROSTATIC CHUCK ASSEMBLY
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2000
|
Application #:
|
08892469
|
Filing Dt:
|
07/14/1997
|
|
Title:
|
SINGLE BODY INJECTOR AND METHOD FOR DELIVERING GASES TO A SURFACE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/11/1998
|
Application #:
|
08909580
|
Filing Dt:
|
08/12/1997
|
|
Title:
|
PLASMA ENHANCED CHEMICAL PROCESSING REACTOR AND METHOD
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|
|
|
|
Patent #:
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|
Issue Dt:
|
12/22/1998
|
Application #:
|
08928747
|
Filing Dt:
|
09/12/1997
|
|
Title:
|
GAS INJECTION SYSTEM FOR SEMICONDUCTOR PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/1999
|
Application #:
|
08971316
|
Filing Dt:
|
11/17/1997
|
|
Title:
|
PLASMA GENERATING APPARATUS HAVING AN ELECTROSTATIC SHIELD
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|
|
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|
Patent #:
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|
Issue Dt:
|
08/31/1999
|
Application #:
|
08976928
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Filing Dt:
|
11/24/1997
|
|
Title:
|
PROTECTIVE GAS SHIELD FOR CHEMICAL VAPOR DEPOSITION APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/15/1998
|
Application #:
|
09008024
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Filing Dt:
|
01/16/1998
|
|
Title:
|
FREE FLOATING SHIELD
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/22/2000
|
Application #:
|
09018021
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Filing Dt:
|
02/02/1998
|
|
Title:
|
WAFER CARRIER AND SEMICONDUCTOR APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/02/1999
|
Application #:
|
09019349
|
Filing Dt:
|
02/05/1998
|
|
Title:
|
HIGH TEMPERATURE SUBSTRATE TRANSFER MODULE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/30/2000
|
Application #:
|
09067704
|
Filing Dt:
|
04/28/1998
|
|
Title:
|
METHOD OF MAKING LOW KAPPA DIELECTRIC INORGANIC/ORGANIC HYBRID FILMS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09075854
|
Filing Dt:
|
05/11/1998
|
|
Title:
|
METHOD OF PLANARIZING A SEMICONDUCTOR DEVICE USING A HIGH DENSITY PLASMA SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/30/2001
|
Application #:
|
09092565
|
Filing Dt:
|
06/05/1998
|
|
Title:
|
PLASMA ENHANCED CHEMICAL PROCESSING REACTOR AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2001
|
Application #:
|
09113823
|
Filing Dt:
|
07/10/1998
|
|
Title:
|
SINGLE BODY INJECTOR AND DEPOSITION CHAMBER
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|
|
|
|
Patent #:
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Issue Dt:
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|
Application #:
|
UNAVAILABLE
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Filing Dt:
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Title:
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