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Patent Assignment Details
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Reel/Frame:032311/0909   Pages: 24
Recorded: 02/27/2014
Attorney Dkt #:BATCH 2
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 25
1
Patent #:
6621846
Issue Dt:
09/16/2003
Application #:
09501160
Filing Dt:
02/09/2000
Title:
ELECTRIC DISCHARGE LASER WITH ACTIVE WAVELENGTH CHIRP CORRECTION
2
Patent #:
6320663
Issue Dt:
11/20/2001
Application #:
09513324
Filing Dt:
02/25/2000
Title:
Method and device for spectral measurements of laser beam
3
Patent #:
6529531
Issue Dt:
03/04/2003
Application #:
09597812
Filing Dt:
06/19/2000
Title:
FAST WAVELENGTH CORRECTION TECHNIQUE FOR A LASER
4
Patent #:
6363094
Issue Dt:
03/26/2002
Application #:
09703697
Filing Dt:
11/01/2000
Title:
Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects
5
Patent #:
6778584
Issue Dt:
08/17/2004
Application #:
09716041
Filing Dt:
11/17/2000
Title:
HIGH POWER GAS DISCHARGE LASER WITH HELIUM PURGED LINE NARROWING UNIT
6
Patent #:
6529321
Issue Dt:
03/04/2003
Application #:
09731938
Filing Dt:
12/07/2000
Publication #:
US20010003016
Pub Dt:
06/07/2001
Title:
PROTECTIVE OVERCOAT FOR REPLICATED DIFFRACTION GRATINGS
7
Patent #:
6687562
Issue Dt:
02/03/2004
Application #:
09733194
Filing Dt:
12/08/2000
Publication #:
US20010020195
Pub Dt:
09/06/2001
Title:
PROCESS MONITORING SYSTEM FOR LITHOGRAPHY LASERS
8
Patent #:
6359693
Issue Dt:
03/19/2002
Application #:
09737181
Filing Dt:
12/14/2000
Publication #:
US20010013933
Pub Dt:
08/16/2001
Title:
Double pass double etalon spectrometer
9
Patent #:
6738410
Issue Dt:
05/18/2004
Application #:
09738042
Filing Dt:
12/15/2000
Publication #:
US20010014110
Pub Dt:
08/16/2001
Title:
LINE NARROWED LASER WITH BIDIRECTION BEAM EXPANSION
10
Patent #:
7190708
Issue Dt:
03/13/2007
Application #:
09742485
Filing Dt:
12/20/2000
Publication #:
US20020122453
Pub Dt:
09/05/2002
Title:
ANNEALED COPPER ALLOY ELECTRODES FOR FLUORINE CONTAINING GAS DISCHARGE LASERS
11
Patent #:
6654403
Issue Dt:
11/25/2003
Application #:
09748317
Filing Dt:
12/22/2000
Publication #:
US20030165175
Pub Dt:
09/04/2003
Title:
FLOW SHAPING ELECTRODE WITH EROSION PAD FOR GAS DISCHARGE LASER
12
Patent #:
6414979
Issue Dt:
07/02/2002
Application #:
09768753
Filing Dt:
01/23/2001
Publication #:
US20010050939
Pub Dt:
12/13/2001
Title:
GAS DISCHARGE LASER WITH BLADE-DIELECTRIC ELECTRODE
13
Patent #:
6539042
Issue Dt:
03/25/2003
Application #:
09771789
Filing Dt:
01/29/2001
Publication #:
US20020105996
Pub Dt:
08/08/2002
Title:
ULTRA PURE COMPONENT PURGE SYSTEM FOR GAS DISCHARGE LASER
14
Patent #:
6480275
Issue Dt:
11/12/2002
Application #:
09772293
Filing Dt:
01/29/2001
Publication #:
US20020101588
Pub Dt:
08/01/2002
Title:
HIGH RESOLUTION ETALON-GRATING MONOCHROMATOR
15
Patent #:
6584132
Issue Dt:
06/24/2003
Application #:
09776044
Filing Dt:
02/01/2001
Publication #:
US20020080840
Pub Dt:
06/27/2002
Title:
SPINODAL COPPER ALLOY ELECTRODES
16
Patent #:
6532247
Issue Dt:
03/11/2003
Application #:
09794782
Filing Dt:
02/27/2001
Publication #:
US20020006149
Pub Dt:
01/17/2002
Title:
LASER WAVELENGTH CONTROL UNIT WITH PIEZOELECTRIC DRIVER
17
Patent #:
6466601
Issue Dt:
10/15/2002
Application #:
09834840
Filing Dt:
04/13/2001
Publication #:
US20020150138
Pub Dt:
10/17/2002
Title:
BEAM SEAL FOR LINE NARROWED PRODUCTION LASER
18
Patent #:
6618421
Issue Dt:
09/09/2003
Application #:
09837035
Filing Dt:
04/18/2001
Publication #:
US20020012376
Pub Dt:
01/31/2002
Title:
HIGH REPETITION RATE GAS DISCHARGE LASER WITH PRECISE PULSE TIMING CONTROL
19
Patent #:
6504860
Issue Dt:
01/07/2003
Application #:
09837150
Filing Dt:
04/18/2001
Publication #:
US20020101903
Pub Dt:
08/01/2002
Title:
PURGE MONITORING SYSTEM FOR GAS DISCHARGE LASER
20
Patent #:
6549551
Issue Dt:
04/15/2003
Application #:
09848043
Filing Dt:
05/03/2001
Publication #:
US20020085606
Pub Dt:
07/04/2002
Title:
INJECTION SEEDED LASER WITH PRECISE TIMING CONTROL
21
Patent #:
6757316
Issue Dt:
06/29/2004
Application #:
09854097
Filing Dt:
05/11/2001
Publication #:
US20020021728
Pub Dt:
02/21/2002
Title:
FOUR KHZ GAS DISCHARGE LASER
22
Patent #:
6556600
Issue Dt:
04/29/2003
Application #:
09855310
Filing Dt:
05/14/2001
Publication #:
US20020186739
Pub Dt:
12/12/2002
Title:
INJECTION SEEDED F2 LASER WITH CENTERLINE WAVELENGTH CONTROL
23
Patent #:
6566668
Issue Dt:
05/20/2003
Application #:
09875721
Filing Dt:
06/06/2001
Publication #:
US20020014599
Pub Dt:
02/07/2002
Title:
PLASMA FOCUS LIGHT SOURCE WITH TANDEM ELLIPSOIDAL MIRROR UNITS
24
Patent #:
6496528
Issue Dt:
12/17/2002
Application #:
09895664
Filing Dt:
06/29/2001
Publication #:
US20020034208
Pub Dt:
03/21/2002
Title:
LINE NARROWING UNIT WITH FLEXURAL GRATING MOUNT
25
Patent #:
7203562
Issue Dt:
04/10/2007
Application #:
10767316
Filing Dt:
01/28/2004
Publication #:
US20040186609
Pub Dt:
09/23/2004
Title:
PROCESS MONITORING SYSTEM FOR LITHOGRAPHY LASERS
Assignor
1
CYMER, INC.
Exec Dt:
05/30/2013
Assignee
1
CYMER, LLC
17075 THORNMINT COURT
INTELLECTUAL PROPERTY DEPT MS/4-2D
SAN DIEGO, CALIFORNIA 92127
Correspondence name and address
CYMER, LLC
17075 THORNMINT COURT
INTELLECTUAL PROP DEPT - MS/4-2D
SAN DIEGO, CA 92127

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