Patent Assignment Details
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| Reel/Frame: | 033046/0910 | |
| Pages: | 4 |
| | Recorded: | 06/06/2014 | | |
| Attorney Dkt #: | 033339/440646 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14105648
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Filing Dt:
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12/13/2013
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Publication #:
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Pub Dt:
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06/19/2014
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Title:
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SIMULATION OF SHOT-NOISE EFFECTS IN A PARTICLE-BEAM LITHOGRAPHY PROCESS AND ESPECIALLY AN E-BEAM LITHOGRAPHY PROCESS
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Assignees
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| 25 RUE LEBLANC |
| BATIMENT <LE PONANT D> |
| PARIS, FRANCE 75015 |
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| 7, PARVIS LOUIS NEEL |
| GRENOBLE, FRANCE 38000 |
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Correspondence name and address
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TIMOTHY J. BALTS
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101 S. TRYON STREET, SUITE 4000
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ALSTON & BIRD LLP
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CHARLOTTE, NC 28280-4000
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