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Reel/Frame:057757/0925   Pages: 8
Recorded: 10/08/2021
Attorney Dkt #:15157-000658-US
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE THE 3RD INVENTORS NAME PREVIOUSLY RECORDED AT REEL: 050488 FRAME: 0854. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Total properties: 1
1
Patent #:
Issue Dt:
03/01/2022
Application #:
16582549
Filing Dt:
09/25/2019
Publication #:
Pub Dt:
02/04/2021
Title:
Method And Apparatus For Determining Expansion Compensation In Photoetching Process, And Method For Manufacturing Device
Assignors
1
Exec Dt:
09/20/2019
2
Exec Dt:
09/20/2019
3
Exec Dt:
09/20/2019
Assignee
1
NO. 18, GAOXIN 4TH ROAD
DONGHU DEVELOPMENT ZONE
WUHAN, CHINA 430205
Correspondence name and address
HARNESS, DICKEY & PIERCE, P.L.C.
5445 CORPORATE DRIVE
SUITE 200
TROY, MI 48098

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