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Reel/Frame:041221/0928   Pages: 20
Recorded: 02/10/2017
Attorney Dkt #:30623-0063001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/04/2018
Application #:
15410918
Filing Dt:
01/20/2017
Publication #:
Pub Dt:
05/11/2017
Title:
METHOD FOR THREE-DIMENSIONALLY MEASURING A 3D AERIAL IMAGE OF A LITHOGRAPHY MASK
Assignors
1
Exec Dt:
02/03/2017
2
Exec Dt:
02/03/2017
3
Exec Dt:
02/09/2017
4
Exec Dt:
02/02/2017
5
Exec Dt:
02/03/2017
Assignee
1
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondence name and address
REX I. HUANG
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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