Total properties:
29
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
05496519
|
Filing Dt:
|
|
Title:
|
|
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
05510148
|
Filing Dt:
|
|
Title:
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/09/1976
|
Application #:
|
05578735
|
Filing Dt:
|
05/19/1975
|
Title:
|
SUBSTRATE STRIPPING AND CLEANING APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
05625136
|
Filing Dt:
|
|
Title:
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/1979
|
Application #:
|
05841656
|
Filing Dt:
|
10/13/1977
|
Title:
|
APPARATUS FOR AND METHOD OF CLEANING AND REMOVING STATIC CHARGES FROM SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
|
Application #:
|
05908701
|
Filing Dt:
|
|
Title:
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/01/1981
|
Application #:
|
06060973
|
Filing Dt:
|
07/26/1979
|
Title:
|
APPLYING PHOTORESIST ONTO SILICON WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/07/1986
|
Application #:
|
06613429
|
Filing Dt:
|
05/24/1984
|
Title:
|
COMBINED HIGH INTENSITY LIGHT AND HOLDER FOR SILICON WAFERS OR SIMILAR ARTICLE
|
|
|
Patent #:
|
|
Issue Dt:
|
09/02/1986
|
Application #:
|
06626640
|
Filing Dt:
|
07/02/1984
|
Title:
|
METHOD OF APPARATUS FOR APPLYING CHEMICALS TO SUBSTRATES IN AN ACID PROCESSING SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
07/28/1987
|
Application #:
|
06626702
|
Filing Dt:
|
07/02/1984
|
Title:
|
RINSING IN ACID PROCESSING OF SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/1987
|
Application #:
|
06636724
|
Filing Dt:
|
08/01/1984
|
Title:
|
BOWL FOR LIQUID SPRAY PROCESSING MACHINE
|
|
|
Patent #:
|
|
Issue Dt:
|
06/17/1986
|
Application #:
|
06655253
|
Filing Dt:
|
09/28/1984
|
Title:
|
CARRIER HANDLE
|
|
|
Patent #:
|
|
Issue Dt:
|
07/28/1987
|
Application #:
|
06759426
|
Filing Dt:
|
07/26/1985
|
Title:
|
WAFER PROCESSING MACHINE
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/1987
|
Application #:
|
06815025
|
Filing Dt:
|
12/30/1985
|
Title:
|
BUNG CONNECTION
|
|
|
Patent #:
|
|
Issue Dt:
|
09/22/1987
|
Application #:
|
06868568
|
Filing Dt:
|
05/30/1986
|
Title:
|
FLOW REGULATING VALVE FOR CONTROLLING THE FLOW OF CORROSIVE FLUIDS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/1987
|
Application #:
|
06891111
|
Filing Dt:
|
07/28/1986
|
Title:
|
WAFER PROCESSING MACHINE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/1988
|
Application #:
|
06907249
|
Filing Dt:
|
09/15/1986
|
Title:
|
APPARATUS FOR CLEANING, RINSING AND DRYING SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
01/31/1989
|
Application #:
|
06920516
|
Filing Dt:
|
12/12/1986
|
Title:
|
RINSING IN ACID PROCESSING OF SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/1989
|
Application #:
|
07015247
|
Filing Dt:
|
02/17/1987
|
Title:
|
APPARATUS AND PROCESS FOR STATIC DRYING OF SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/1988
|
Application #:
|
07042547
|
Filing Dt:
|
04/24/1987
|
Title:
|
APPARATUS FOR CLEANING RINSING AND DRYING SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
06/07/1988
|
Application #:
|
07048952
|
Filing Dt:
|
05/12/1987
|
Title:
|
GASEOUS PROCESS AND APPARATUS FOR REMOVING FILMS FROM SUBSTRATES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/1989
|
Application #:
|
07135939
|
Filing Dt:
|
12/21/1987
|
Title:
|
FLOW CONTROL MANIFOLD
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/1989
|
Application #:
|
07158194
|
Filing Dt:
|
02/19/1988
|
Title:
|
ROTARY FLUID COUPLING
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/1989
|
Application #:
|
07160650
|
Filing Dt:
|
02/26/1988
|
Title:
|
FLUID TIGHT COVER SEAL
|
|
|
Patent #:
|
|
Issue Dt:
|
08/15/1989
|
Application #:
|
07247712
|
Filing Dt:
|
09/22/1988
|
Title:
|
METHOD AND APPARATUS FOR CONTROLLING SIMULTANEOUS ETCHING OF FRONT AND BACK SIDES OF WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/1995
|
Application #:
|
07320494
|
Filing Dt:
|
03/08/1989
|
Title:
|
ETCH CHAMBER WITH GAS DISPERSING MEMBRANE
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/1990
|
Application #:
|
07334343
|
Filing Dt:
|
04/07/1989
|
Title:
|
HF GAS ETCHING OF WAFERS IN AN ACID PROCESSOR
|
|
|
Patent #:
|
|
Issue Dt:
|
05/21/1991
|
Application #:
|
07396116
|
Filing Dt:
|
08/21/1989
|
Title:
|
HIGH FREQUENCY SONIC SUBSTRATE PROCESSING MODULE
|
|
|
Patent #:
|
|
Issue Dt:
|
12/08/1992
|
Application #:
|
07470871
|
Filing Dt:
|
01/26/1990
|
Title:
|
APPARATUS FOR WAFER PROCESSING WITH INSITU RINSE
|
|