Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 016842/0933 | |
| Pages: | 6 |
| | Recorded: | 12/02/2005 | | |
| Attorney Dkt #: | 56231-542 (MKSK-164) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11223366
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Filing Dt:
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09/09/2005
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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Precursor gas delivery with carrier gas mixing
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Assignee
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887 |
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Correspondence name and address
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ELIZABETH E. KIM
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28 STATE STREET
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BOSTON, MA 02109
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