Total properties:
13
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Patent #:
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Issue Dt:
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04/13/2010
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Application #:
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11245691
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Filing Dt:
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10/06/2005
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Publication #:
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Pub Dt:
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01/11/2007
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Title:
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SYSTEMS, MASKS, AND METHODS FOR MANUFACTURABLE MASKS USING A FUNCTIONAL REPRESENTATION OF POLYGON PATTERN
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Patent #:
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Issue Dt:
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08/31/2010
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Application #:
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11538290
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Filing Dt:
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10/03/2006
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Publication #:
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Pub Dt:
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08/09/2007
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Title:
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LITHOGRAPHY VERIFICATION USING GUARD BANDS
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Patent #:
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Issue Dt:
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04/05/2011
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Application #:
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11538420
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Filing Dt:
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10/03/2006
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Publication #:
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Pub Dt:
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08/09/2007
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Title:
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MASK-PATTERN DETERMINATION USING TOPOLOGY TYPES
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Patent #:
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Issue Dt:
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09/07/2010
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Application #:
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11538782
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Filing Dt:
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10/04/2006
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Publication #:
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Pub Dt:
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08/23/2007
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Title:
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MASK-PATTERNS INCLUDING INTENTIONAL BREAKS
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11539601
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Filing Dt:
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10/06/2006
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Publication #:
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Pub Dt:
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08/09/2007
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Title:
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SYSTEM, MASKS, AND METHODS FOR PHOTOMASKS OPTIMIZED WITH APPROXIMATE AND ACCURATE MERIT FUNCTIONS
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Patent #:
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Issue Dt:
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12/20/2011
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Application #:
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12423686
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Filing Dt:
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04/14/2009
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Publication #:
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Pub Dt:
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12/24/2009
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Title:
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MASK PATTERNS FOR USE IN MULTIPLE-EXPOSURE LITHOGRAPHY
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Patent #:
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Issue Dt:
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12/20/2011
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Application #:
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12423693
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Filing Dt:
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04/14/2009
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Publication #:
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Pub Dt:
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11/26/2009
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Title:
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TECHNIQUE FOR CORRECTING HOTSPOTS IN MASK PATTERNS AND WRITE PATTERNS
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Patent #:
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Issue Dt:
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03/25/2014
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Application #:
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12507336
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Filing Dt:
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07/22/2009
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Publication #:
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Pub Dt:
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01/27/2011
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Title:
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DETERMINING SOURCE PATTERNS FOR USE IN PHOTOLITHOGRAPHY
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Patent #:
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Issue Dt:
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07/30/2013
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Application #:
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12715351
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Filing Dt:
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03/01/2010
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Publication #:
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Pub Dt:
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09/01/2011
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Title:
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Full-Field Mask Error Enhancement Function
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Patent #:
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Issue Dt:
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10/09/2012
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Application #:
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12724362
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Filing Dt:
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03/15/2010
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Publication #:
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Pub Dt:
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09/15/2011
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Title:
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DETERMINING CALIBRATION PARAMETERS FOR A LITHOGRAPHIC PROCESS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13297016
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Filing Dt:
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11/15/2011
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Publication #:
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Pub Dt:
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05/16/2013
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Title:
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OPC Checking and Classification
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Patent #:
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Issue Dt:
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06/25/2013
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Application #:
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13305650
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Filing Dt:
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11/28/2011
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Publication #:
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Pub Dt:
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05/30/2013
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Title:
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LITHOGRAPHICALLY ENHANCED EDGE DETERMINATION
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Patent #:
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Issue Dt:
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08/13/2013
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Application #:
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13313957
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Filing Dt:
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12/07/2011
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Publication #:
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Pub Dt:
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06/13/2013
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Title:
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SPATIAL MAP OF MASK-PATTERN DEFECTS
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