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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10029515
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Filing Dt:
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12/21/2001
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS WITH POROUS VACUUM CHUCK AND PERFORATED CARRIER FILM
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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10029742
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Filing Dt:
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12/21/2001
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Title:
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METHOD AND APPARATUS FOR REDUCING COMPRESSED DRY AIR USAGE DURING CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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01/31/2006
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Application #:
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10029958
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Filing Dt:
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12/21/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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APPARATUS FOR EDGE POLISHING UNIFORMITY CONTROL
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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10033455
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Filing Dt:
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12/26/2001
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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APPARATUS AND METHODS FOR CONTROLLING WAFER TEMPERATURE IN CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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10033479
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Filing Dt:
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12/26/2001
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Title:
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ACTIVE GIMBAL RING WITH INTERNAL GEL AND METHODS FOR MAKING SAME
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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10033501
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Filing Dt:
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12/26/2001
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Title:
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CMP BELT STRETCH COMPENSATION APPARATUS AND METHODS FOR USING THE SAME
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Patent #:
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Issue Dt:
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01/13/2004
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Application #:
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10033615
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Filing Dt:
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12/26/2001
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Title:
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INTEGRATED PLANARIZATION AND CLEAN WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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10033671
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Filing Dt:
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12/27/2001
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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METHOD AND APPARATUS FOR APPLYING DOWNWARD FORCE ON WAFER DURING CMP
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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10037452
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Filing Dt:
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12/20/2001
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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AIR PLATEN FOR LEADING EDGE AND TRAILING EDGE CONTROL
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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10039749
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Filing Dt:
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10/26/2001
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Publication #:
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Pub Dt:
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05/01/2003
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Title:
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METHOD AND APPARATUS FOR CONTROLLING CMP PAD SURFACE FINISH
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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10040501
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Filing Dt:
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12/28/2001
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Publication #:
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Pub Dt:
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07/24/2003
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Title:
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GROOVED ROLLERS FOR A LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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10041027
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Filing Dt:
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12/28/2001
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Publication #:
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Pub Dt:
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07/03/2003
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Title:
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METHODS AND APPARATUS FOR CONDITIONING AND TEMPERATURE CONTROL OF A PROCESSING SURFACE
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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10078941
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Filing Dt:
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02/20/2002
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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APPARATUS AND METHOD FOR QUALIFYING A CHEMICAL MECHANICAL PLANARIZATION PROCESS
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Patent #:
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Issue Dt:
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12/23/2003
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Application #:
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10097337
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Filing Dt:
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03/12/2002
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Publication #:
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Pub Dt:
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09/18/2003
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Title:
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REINFORCED CHEMICAL MECHANICAL PLANARIZATION BELT
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10100740
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Filing Dt:
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03/19/2002
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Title:
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METHOD AND APPARATUS FOR CONDITIONING FIXED-ABRASIVE POLISHING PADS
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Patent #:
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Issue Dt:
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08/26/2003
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Application #:
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10109902
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Filing Dt:
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03/29/2002
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Title:
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CHEMICAL MECHANICAL PLANARIZATION (CMP) SYSTEM AND METHOD FOR DETERMINING AN ENDPOINT IN A CMP OPERATION
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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10112399
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Filing Dt:
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03/29/2002
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Title:
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GIMBALLED CONDITIONING APPARATUS
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10112421
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Filing Dt:
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03/29/2002
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Title:
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LIQUID DISPENSE MANIFOLD FOR CHEMICAL-MECHANICAL POLISHER
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10112424
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Filing Dt:
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03/29/2002
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Title:
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FLUID CONSERVING PLATEN FOR OPTIMIZING EDGE POLISHING
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10112425
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Filing Dt:
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03/29/2002
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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SYSTEM AND METHOD OF BROAD BAND OPTICAL END POINT DETECTION FOR FILM CHANGE INDICATION
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10112628
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Filing Dt:
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03/29/2002
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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METHOD AND APPARATUS FOR HEATING POLISHING PAD
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10113755
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Filing Dt:
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03/27/2002
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Title:
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SYSTEM AND METHOD FOR SPINDLE DRIVE DOWNFORCE CALIBRATION
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10132096
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Filing Dt:
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04/24/2002
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Title:
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BYPRODUCT CONTROL IN LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM
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Patent #:
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Issue Dt:
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02/22/2005
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Application #:
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10184152
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Filing Dt:
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06/26/2002
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Title:
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METHOD FOR MAKING REINFORCED BELT PAD FOR LINEAR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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12/23/2003
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Application #:
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10184163
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Filing Dt:
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06/26/2002
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Title:
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BELT WIPER FOR A CHEMICAL MECHANICAL PLANARIZATION SYSTEM
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Patent #:
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Issue Dt:
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10/31/2006
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Application #:
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10186472
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Filing Dt:
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06/28/2002
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Publication #:
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Pub Dt:
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04/07/2005
| | | | |
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Title:
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INTEGRATION OF SENSOR BASED METROLOGY INTO SEMICONDUCTOR PROCESSING TOOLS
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Patent #:
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Issue Dt:
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07/06/2004
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Application #:
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10186888
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Filing Dt:
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06/28/2002
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Publication #:
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Pub Dt:
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01/01/2004
| | | | |
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Title:
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PARTIAL-MEMBRANE CARRIER HEAD
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10186909
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Filing Dt:
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06/28/2002
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Title:
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FLUID VENTING PLATEN FOR OPTIMIZING WAFER POLISHING
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10186912
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Filing Dt:
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06/28/2002
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Title:
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METHOD FOR REDUCING OR ELIMINATING DE-LAMINATION OF SEMICONDUCTOR WAFER FILM LAYERS DURING A CHEMICAL MECHANICAL PLANARIZATION PROCESS
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Patent #:
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Issue Dt:
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05/03/2005
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Application #:
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10186930
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Filing Dt:
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06/28/2002
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Title:
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300MM PLATEN AND BELT CONFIGURATION
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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10186932
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Filing Dt:
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06/28/2002
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Title:
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METHOD AND APPARATUS OF ARRAYED SENSORS FOR METROLOGICAL CONTROL
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Patent #:
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Issue Dt:
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04/06/2004
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Application #:
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10186944
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Filing Dt:
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06/28/2002
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Title:
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PROFILED RETAINING RING FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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11/23/2004
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Application #:
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10187228
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Filing Dt:
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06/28/2002
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Title:
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CARRIER HEAD HAVING LOCATION OPTIMIZED VACUUM HOLES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10202053
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Filing Dt:
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07/23/2002
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Publication #:
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Pub Dt:
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12/12/2002
| | | | |
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Title:
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INTERLOCKING CHEMICAL MECHANICAL POLISHING SYSTEM
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10206749
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Filing Dt:
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07/26/2002
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Title:
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AFFERENT-BASED POLISHING MEDIA FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10251033
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Filing Dt:
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09/19/2002
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Publication #:
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Pub Dt:
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03/25/2004
| | | | |
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Title:
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SYSTEM AND METHOD FOR METAL RESIDUE DETECTION AND MAPPING WITHIN A MULTI-STEP SEQUENCE
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10261568
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Filing Dt:
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09/30/2002
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Title:
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METHODS AND SYSTEMS FOR CONTROLLING BELT SURFACE TEMPERATURE AND SLURRY TEMPERATURE IN LINEAR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
|
12/09/2003
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Application #:
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10319758
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Filing Dt:
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12/13/2002
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Title:
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SYSTEM FOR WAFER CARRIER IN-PROCESS CLEAN AND RINSE
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10327565
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Filing Dt:
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12/20/2002
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Title:
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METHOD AND APPARATUS FOR AN AIR BEARING PLATEN WITTH RAISED TOPOGRAPHY
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Patent #:
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Issue Dt:
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05/17/2005
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Application #:
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10328884
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Filing Dt:
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12/23/2002
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Publication #:
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Pub Dt:
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06/24/2004
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Title:
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METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING COMPLIMENTARY SENSORS
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Patent #:
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Issue Dt:
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10/19/2004
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Application #:
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10330519
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Filing Dt:
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12/24/2002
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Title:
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MOLDED END POINT DETECTION WINDOW FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10345694
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Filing Dt:
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01/15/2003
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Title:
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CHEMICAL MECHANICAL PLANARIZATION (CMP) APPARATUS
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10345775
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Filing Dt:
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01/15/2003
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Title:
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ELECTROCHEMICAL ASSISTED CMP
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Patent #:
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Issue Dt:
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10/11/2005
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Application #:
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10460502
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Filing Dt:
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06/11/2003
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Publication #:
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Pub Dt:
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11/06/2003
| | | | |
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Title:
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APPARATUS AND METHOD FOR PROVIDING A SIGNAL PORT IN A POLISHING PAD FOR OPTICAL ENDPOINT DETECTION
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Patent #:
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Issue Dt:
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12/18/2007
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Application #:
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10463525
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Filing Dt:
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06/18/2003
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Publication #:
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Pub Dt:
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01/01/2004
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Title:
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METHOD AND APPARATUS FOR REAL TIME METAL FILM THICKNESS MEASUREMENT
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10465731
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Filing Dt:
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06/18/2003
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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PAD CONDITIONER CONTROL USING FEEDBACK FROM A MEASURED POLISHING PAD ROUGHNESS LEVEL
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Patent #:
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Issue Dt:
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03/28/2006
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Application #:
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10607613
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Filing Dt:
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06/27/2003
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Title:
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PLATEN WITH DIAPHRAGM AND METHOD FOR OPTIMIZING WAFER POLISHING
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Patent #:
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Issue Dt:
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02/21/2006
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Application #:
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10609357
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Filing Dt:
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06/27/2003
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Title:
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NEURAL NETWORK CONTROL OF CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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08/16/2005
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Application #:
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10611143
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Filing Dt:
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06/30/2003
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Title:
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METHODS FOR MONITORING AND CONTROLLING CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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10641914
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Filing Dt:
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08/15/2003
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Publication #:
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Pub Dt:
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02/17/2005
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Title:
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ASSEMBLY AND METHOD FOR GENERATING A HYDRODYNAMIC AIR BEARING
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Patent #:
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Issue Dt:
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01/24/2006
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Application #:
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10674319
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Filing Dt:
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09/29/2003
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Title:
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METHOD AND APPARATUS OF A VARIABLE HEIGHT AND CONTROLLED FLUID FLOW PLATEN IN A CHEMICAL MECHANICAL POLISHING SYSTEM
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Patent #:
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Issue Dt:
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02/28/2006
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Application #:
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10674941
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Filing Dt:
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09/29/2003
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Title:
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APPARATUS AND ASSOCIATED METHOD FOR CONDITIONING IN CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10676388
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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SYSTEM, METHOD AND APPARATUS FOR APPLYING LIQUID TO A CMP POLISHING PAD
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Patent #:
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Issue Dt:
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08/29/2006
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Application #:
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10721136
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Filing Dt:
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11/24/2003
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Publication #:
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Pub Dt:
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08/26/2004
| | | | |
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Title:
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SYSTEM AND METHOD OF BROAD BAND OPTICAL END POINT DETECTION FOR FILM CHANGE INDICATION
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Patent #:
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Issue Dt:
|
08/08/2006
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Application #:
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10743923
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Filing Dt:
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12/22/2003
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Title:
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LINEAR CHEMICAL MECHANICAL PLANARIZATION (CMP) SYSTEM AND METHOD FOR PLANARIZING A WAFER IN A SINGLE CMP MODULE
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Patent #:
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Issue Dt:
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07/18/2006
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Application #:
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10743963
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Filing Dt:
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12/22/2003
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Title:
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CHEMICAL MECHANICAL PLANARIZATION (CMP) SYSTEM AND METHOD FOR PREPARING A WAFER IN A CLEANING MODULE
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Patent #:
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Issue Dt:
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02/07/2006
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Application #:
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10744280
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Filing Dt:
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12/22/2003
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Title:
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CHEMICAL MECHANICAL PLANARIZATION SYSTEM WITH REPLACEABLE PAD ASSEMBLY
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Patent #:
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Issue Dt:
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04/17/2007
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Application #:
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10749531
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Filing Dt:
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12/30/2003
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Publication #:
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Pub Dt:
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10/21/2004
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Title:
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METHOD AND APPARATUS OF ARRAYED, CLUSTERED OR COUPLED EDDY CURRENT SENSOR CONFIGURATION FOR MEASURING CONDUCTIVE FILM PROPERTIES
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Patent #:
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Issue Dt:
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11/29/2005
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Application #:
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10812824
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Filing Dt:
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03/30/2004
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Publication #:
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Pub Dt:
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10/06/2005
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Title:
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POLISHING PAD CONDITIONING AND POLISHING LIQUID DISPERSAL SYSTEM
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Patent #:
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Issue Dt:
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10/25/2005
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Application #:
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10813294
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Filing Dt:
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03/30/2004
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Publication #:
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Pub Dt:
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10/06/2005
| | | | |
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Title:
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POLISHING PAD CONDITIONING SYSTEM
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Patent #:
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Issue Dt:
|
05/31/2005
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Application #:
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10813754
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Filing Dt:
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03/30/2004
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Title:
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RELATIVE LATERAL MOTION IN LINEAR CMP
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Patent #:
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Issue Dt:
|
09/19/2006
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Application #:
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10816418
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Filing Dt:
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03/31/2004
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Title:
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COMPLIANT WAFER CHUCK
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Patent #:
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Issue Dt:
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10/18/2005
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Application #:
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10816431
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Filing Dt:
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03/31/2004
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Title:
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METHOD OF AND PLATEN FOR CONTROLLING REMOVAL RATE CHARACTERISTICS IN CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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08/30/2005
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Application #:
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10816444
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Filing Dt:
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03/31/2004
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Title:
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MULTIPLE-CONDITIONING MEMBER DEVICE FOR CHEMICAL MECHANICAL PLANARIZATION CONDITIONING
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10892428
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Filing Dt:
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07/15/2004
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Publication #:
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Pub Dt:
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01/19/2006
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Title:
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APPARATUS AND METHOD FOR DISTRIBUTING A POLISHING FLUID
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Patent #:
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Issue Dt:
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05/23/2006
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Application #:
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10948510
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Filing Dt:
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09/22/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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SEMICONDUCTOR WAFER MATERIAL REMOVAL APPARATUS AND METHOD FOR OPERATING THE SAME
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Patent #:
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Issue Dt:
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05/09/2006
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Application #:
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10952608
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Filing Dt:
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09/28/2004
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Title:
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METHODS OF AND APPARATUS FOR CONTROLLING POLISHING SURFACE CHARACTERISTICS FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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12/26/2006
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Application #:
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10955044
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Filing Dt:
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09/30/2004
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Title:
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SYSTEM AND METHOD FOR IN SITU CHARACTERIZATION AND MAINTENANCE OF POLISHING PAD SMOOTHNESS IN CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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03/21/2006
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Application #:
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10991669
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Filing Dt:
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11/18/2004
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Title:
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METHOD AND APPARATUS FOR MINIMIZING AGGLOMERATE PARTICLE SIZE IN A POLISHING FLUID
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Patent #:
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Issue Dt:
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09/18/2007
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Application #:
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11256293
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Filing Dt:
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10/21/2005
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Publication #:
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Pub Dt:
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02/23/2006
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Title:
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METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PAD CLEANING
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