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Patent Assignment Details
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Reel/Frame:013278/0937   Pages: 3
Recorded: 09/12/2002
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
06/19/2012
Application #:
10166303
Filing Dt:
06/11/2002
Publication #:
Pub Dt:
01/02/2003
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR MANUFACTURING APPARATUS
Assignors
1
Exec Dt:
08/30/2002
2
Exec Dt:
08/30/2002
3
Exec Dt:
08/30/2002
Assignee
1
7-1, SHIBA 5-CHOME MINATO-KU
TOKYO, JAPAN
Correspondence name and address
YOUNG & THOMPSON
ROBERT J. PATCH
SECOND FLOOR
745 SOUTH 23RD STREET
ARLINGTON, VA 22202

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