Patent Assignment Details
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Reel/Frame: | 013278/0937 | |
| Pages: | 3 |
| | Recorded: | 09/12/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/19/2012
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Application #:
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10166303
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Filing Dt:
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06/11/2002
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Publication #:
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Pub Dt:
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01/02/2003
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignee
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7-1, SHIBA 5-CHOME MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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YOUNG & THOMPSON
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ROBERT J. PATCH
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SECOND FLOOR
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745 SOUTH 23RD STREET
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ARLINGTON, VA 22202
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