Patent Assignment Details
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Reel/Frame: | 022018/0939 | |
| Pages: | 8 |
| | Recorded: | 12/22/2008 | | |
Attorney Dkt #: | UNAX-36121US2 |
Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/10/2009
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Application #:
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10935779
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Filing Dt:
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09/08/2004
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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VOLTAGE NON-UNIFORMITY COMPENSATION METHOD FOR HIGH FREQUENCY PLASMA REACTOR FOR THE TREATMENT OF RECTANGULAR LARGE AREA SUBSTRATES
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Assignee
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IRAMALI 18 |
BALZERS, LIECHTENSTEIN 9496 |
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Correspondence name and address
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PEARNE & GORDON LLP
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1801 EAST 9TH STREET, SUITE 1200
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CLEVELAND, OH 44114
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