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215
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3
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3
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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09834118
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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METHOD OF CALIBRATING A SEMICONDUCTOR WAFER DRYING APPARATUS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09834819
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Filing Dt:
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04/13/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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System and method for reconditioning a chiller
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09853232
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Filing Dt:
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05/11/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Title:
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PROCESS FOR GROWING SILICON CRYSTALS WHICH ALLOWS FOR VARIABILITY IN PROCESS CONDITIONS WHILE SUPPRESSING THE FORMATION OF AGGLOMERATED INTRINSIC POINT DEFECTS
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09859094
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Filing Dt:
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05/16/2001
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Publication #:
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Pub Dt:
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10/25/2001
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Title:
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EPITAXIAL SILICON WAFER WITH INTRINSIC GETTERING AND A METHOD FOR THE PREPARATION THEREOF
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09859826
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Filing Dt:
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05/17/2001
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Publication #:
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Pub Dt:
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10/25/2001
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Title:
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BARIUM DOPING OF MOLTEN SILICON FOR USE IN CRYSTAL GROWING PROCESS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09865083
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Filing Dt:
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05/24/2001
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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METHOD FOR CALIBRATING NANOTOPOGRAPHIC MEASURING EQUIPMENT
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09869084
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Filing Dt:
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06/20/2001
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Title:
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METHOD FOR STORING CARRIER FOR POLISHING WAFER
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Patent #:
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Issue Dt:
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02/10/2004
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Application #:
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09871255
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Filing Dt:
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05/31/2001
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Publication #:
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Pub Dt:
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05/09/2002
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Title:
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PROCESS FOR PREPARING LOW DEFECT DENSITY SILICON USING HIGH GROWTH RATES
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09874487
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Filing Dt:
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06/05/2001
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Publication #:
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Pub Dt:
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11/15/2001
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Title:
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AN EPITAXIAL WAFER SUBSTANTIALLY FREE OF GROWN-IN DEFECTS
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09892002
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Filing Dt:
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06/26/2001
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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CRYSTAL PULLER AND METHOD FOR GROWING MONOCRYSTALLINE SILICON INGOTS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09896945
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Filing Dt:
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06/29/2001
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Publication #:
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Pub Dt:
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03/21/2002
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Title:
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Process for etching silicon wafers
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09928559
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Filing Dt:
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08/13/2001
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Publication #:
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Pub Dt:
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05/02/2002
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Title:
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METHOD AND APPARATUS FOR PROCESSING A SEMICONDUCTOR WAFER USING NOVEL FINAL POLISHING METHOD
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09929585
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Filing Dt:
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08/14/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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PROCESS FOR THE PREPARATION OF NON-OXYGEN PRECIPITATING CZOCHRALSKI SILICON WAFERS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09970404
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Filing Dt:
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10/03/2001
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Publication #:
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Pub Dt:
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04/03/2003
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Title:
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Apparatus and process for producing polished semiconductor wafers
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Patent #:
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Issue Dt:
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02/22/2005
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Application #:
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09972608
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Filing Dt:
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10/05/2001
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Publication #:
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Pub Dt:
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05/16/2002
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Title:
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METHOD FOR THE PRODUCTION OF LOW DEFECT DENSITY SILICON
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