Patent Assignment Details
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Reel/Frame: | 017033/0949 | |
| Pages: | 5 |
| | Recorded: | 09/28/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/13/2006
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Application #:
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11082584
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Filing Dt:
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03/17/2005
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Publication #:
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Pub Dt:
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09/22/2005
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Title:
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METHOD AND APPARATUS FOR IMPROVED BEAM STABILITY IN HIGH CURRENT GAS-CLUSTER ION BEAM PROCESSING SYSTEM
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Assignee
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37 MANNING ROAD |
BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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JERRY COHEN, ESQ.
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PERKINS, SMITH & COHEN, LLP
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ONE BEACON STREET
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BOSTON, MA 02108
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