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Total properties:
13
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Patent #:
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Issue Dt:
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06/06/1995
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Application #:
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08067392
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Filing Dt:
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05/25/1993
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Title:
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METHOD FOR A REACTIVE SURFACE TREATMENT OF A WORKPIECE AND A TREATMENT CHAMBER FOR PRACTICING SUCH METHOD
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Patent #:
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Issue Dt:
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12/02/1997
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Application #:
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08237432
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Filing Dt:
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05/03/1994
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Title:
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METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
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Patent #:
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Issue Dt:
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05/14/1996
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Application #:
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08237575
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Filing Dt:
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05/03/1994
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
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Patent #:
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Issue Dt:
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12/22/1998
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Application #:
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08576236
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Filing Dt:
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12/21/1995
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Title:
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HEATING SYSTEM, VACUUM PROCESS CHAMBER COMPRISING SUCH A HEATING SYSTEM AND OPERATION OF SUCH A VACUUM PROCESS CHAMBER
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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08881759
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Filing Dt:
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06/24/1997
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Title:
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METHOD FOR MONITORING THE FLOW OF A GAS INTO A VACUUM REACTOR
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Patent #:
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Issue Dt:
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10/02/2001
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Application #:
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09177894
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Filing Dt:
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10/23/1998
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATION SAME
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Patent #:
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Issue Dt:
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08/28/2001
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Application #:
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09360247
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Filing Dt:
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07/23/1999
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Title:
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CAPACITIVELY COUPLED RF-PLASMA REACTOR
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09379742
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Filing Dt:
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08/24/1999
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Publication #:
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Pub Dt:
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06/14/2001
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Title:
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METHOD FOR IMPROVING THE RATE OF A PLASMA ENHANCED VACUUM TREATMENT
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Patent #:
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Issue Dt:
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01/23/2001
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Application #:
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09441373
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Filing Dt:
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11/17/1999
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Title:
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PROCESS FOR HANDLING WORKPIECES AND APPARATUS THEREFOR
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09441374
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Filing Dt:
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11/17/1999
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Title:
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PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09559408
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Filing Dt:
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04/26/2000
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Title:
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DESING OF GAS INJECTION FOR THE ELECTRODE IN A CAPACITIVELY COUPLED RF PLASMA REACTOR
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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09766835
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Filing Dt:
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01/23/2001
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Publication #:
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Pub Dt:
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12/13/2001
| | | | |
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Title:
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PROCESSES FOR VACUUM TREATING WORKPIECES, AND CORRESPONDING PROCESS EQUIPMENT
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09925646
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Filing Dt:
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08/10/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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PLASMA TREATMENT APPARATUS AND METHOD FOR OPERATING SAME
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