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Reel/Frame:021170/0954   Pages: 7
Recorded: 06/30/2008
Attorney Dkt #:3194.1057-001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/12/2011
Application #:
12309167
Filing Dt:
01/09/2009
PCT #:
US0716011
Title:
FILTERING SYSTEM FOR A SEMICONDUCTOR PROCESSING TOOL
Assignors
1
Exec Dt:
06/05/2008
2
Exec Dt:
06/18/2008
Assignee
1
3500 LYMAN BOULEVARD
CHASKA, MINNESOTA 55318
Correspondence name and address
ALICE O. CARROLL
530 VRIGINIA ROAD, P.O. BOX 9133
HAMILTON BROOK SMITH & REYNOLDS, P.C.
CONCORD, MA 01742-9133

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