Total properties:
47
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Patent #:
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Issue Dt:
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06/06/2000
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Application #:
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09127762
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Filing Dt:
|
07/31/1998
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Title:
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ETCHING PROCESS FOR PRODUCING SUBSTANTIALLY UNDERCUT FREE SILICON ON INSULATOR STRUCTURES
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Patent #:
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Issue Dt:
|
07/09/2002
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Application #:
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09239723
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Filing Dt:
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01/29/1999
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Title:
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MORPHED PROCESSING OF SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
|
04/01/2003
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Application #:
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09658023
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Filing Dt:
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09/08/2000
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Title:
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MAGNETIC POLE FABRICATION PROCESS AND DEVICE
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Patent #:
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Issue Dt:
|
04/15/2003
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Application #:
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09696739
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Filing Dt:
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10/26/2000
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Title:
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MAGNETIC POLE FABRICATION PROCESS AND DEVICE
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Patent #:
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Issue Dt:
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08/12/2003
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Application #:
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09846214
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Filing Dt:
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05/02/2001
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Publication #:
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Pub Dt:
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11/07/2002
| | | | |
Title:
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METHOD FOR THIN FILM LIFT-OFF PROCESSES USING LATERAL EXTENDED ETCHING MASKS AND DEVICE
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09996748
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Filing Dt:
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11/30/2001
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Publication #:
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Pub Dt:
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06/06/2002
| | | | |
Title:
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EMBEDDED ATTENUATED PHASE SHIFT MASK AND METHOD OF MAKING EMBEDDED ATTENUATED PHASE SHIFT MASK
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Patent #:
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Issue Dt:
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08/03/2004
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Application #:
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10163567
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Filing Dt:
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06/06/2002
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Publication #:
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Pub Dt:
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01/30/2003
| | | | |
Title:
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PERIMETER SEAL FOR BACKSIDE COOLING OF SUBSTRATES
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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10407831
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Filing Dt:
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04/04/2003
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Publication #:
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Pub Dt:
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11/20/2003
| | | | |
Title:
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METHOD FOR ETCHING VIAS
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10601076
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Filing Dt:
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06/19/2003
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Publication #:
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Pub Dt:
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03/25/2004
| | | | |
Title:
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NOTCH-FREE ETCHING OF HIGH ASPECT SOI STRUCTURES USING ALTERNATING DEPOSITION AND ETCHING AND PULSED PLASMA
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Patent #:
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Issue Dt:
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08/02/2005
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Application #:
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10640469
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Filing Dt:
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08/12/2003
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Publication #:
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Pub Dt:
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05/13/2004
| | | | |
Title:
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SIDEWALL SMOOTHING IN HIGH ASPECT RATIO/DEEP ETCHING USING A DISCRETE GAS SWITCHING METHOD
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Patent #:
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Issue Dt:
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01/03/2006
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Application #:
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10770839
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Filing Dt:
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02/02/2004
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Publication #:
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Pub Dt:
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09/09/2004
| | | | |
Title:
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END POINT DETECTION IN TIME DIVISION MULTIPLEXED ETCH PROCESSES
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Patent #:
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Issue Dt:
|
10/03/2006
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Application #:
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10815965
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Filing Dt:
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03/31/2004
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Publication #:
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Pub Dt:
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11/25/2004
| | | | |
Title:
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METHOD AND APPARATUS FOR PROCESS CONTROL IN TIME DIVISION MULTIPLEXED (TDM) ETCH PROCESS
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Patent #:
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Issue Dt:
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03/07/2006
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Application #:
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10839809
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Filing Dt:
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05/03/2004
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Publication #:
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Pub Dt:
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12/23/2004
| | | | |
Title:
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ETCHING OF CHROMIUM LAYERS ON PHOTOMASKS UTILIZING HIGH DENSITY PLASMA AND LOW FREQUENCY RF BIAS
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Patent #:
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Issue Dt:
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09/05/2006
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Application #:
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10841818
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Filing Dt:
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05/06/2004
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Publication #:
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Pub Dt:
|
12/02/2004
| | | | |
Title:
|
ENVELOPE FOLLOWER END POINT DETECTION IN TIME DIVISION MULTIPLEXED PROCESSES
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11155904
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Filing Dt:
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06/20/2005
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Publication #:
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|
Pub Dt:
|
12/01/2005
| | | | |
Title:
|
METHOD AND APPARATUS FOR PROCESS CONTROL IN TIME DIVISION MULTIPLEXED (TDM) ETCH PROCESSES
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Patent #:
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Issue Dt:
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06/14/2011
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Application #:
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11159415
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Filing Dt:
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06/23/2005
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Publication #:
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Pub Dt:
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12/29/2005
| | | | |
Title:
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METHOD AND APPARATUS FOR REDUCING ASPECT RATIO DEPENDENT ETCHING IN TIME DIVISION MULTIPLEXED ETCH PROCESSES
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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11229319
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Filing Dt:
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09/16/2005
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Publication #:
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Pub Dt:
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04/06/2006
| | | | |
Title:
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METHOD & APPARATUS TO IMPROVE PLASMA ETCH UNIFORMITY
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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11441811
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Filing Dt:
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05/26/2006
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Publication #:
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Pub Dt:
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12/21/2006
| | | | |
Title:
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PROCESS CHANGE DETECTION THROUGH THE USE OF EVOLUTIONARY ALGORITHMS
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Patent #:
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Issue Dt:
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11/16/2010
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Application #:
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11502585
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Filing Dt:
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08/10/2006
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Publication #:
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Pub Dt:
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02/22/2007
| | | | |
Title:
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OPTICAL EMISSION INTERFEROMETRY FOR PECVD USING A GAS INJECTION HOLE
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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11634377
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Filing Dt:
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12/04/2006
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Publication #:
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Pub Dt:
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06/21/2007
| | | | |
Title:
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METHOD FOR ETCHING PHOTOLITHOGRAPHIC SUBSTRATES
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Patent #:
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Issue Dt:
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01/11/2011
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Application #:
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11756074
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Filing Dt:
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05/31/2007
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Publication #:
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Pub Dt:
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06/26/2008
| | | | |
Title:
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TEMPERATURE CONTROL METHOD FOR PHOTOLITHOGRAPHIC SUBSTRATE
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11834127
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Filing Dt:
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08/06/2007
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Publication #:
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Pub Dt:
|
03/13/2008
| | | | |
Title:
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METHOD FOR PLASMA ETCHING OF POSITIVELY SLOPED STRUCTURES
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Patent #:
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Issue Dt:
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05/29/2012
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Application #:
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11834299
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Filing Dt:
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08/06/2007
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Publication #:
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Pub Dt:
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02/14/2008
| | | | |
Title:
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METHOD TO MINIMIZE CD ETCH BIAS
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Patent #:
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Issue Dt:
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04/22/2014
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Application #:
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12244681
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Filing Dt:
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10/02/2008
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Title:
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GRID ASSEMBLIES FOR USE IN ION BEAM ETCHING SYSTEMS AND METHODS OF UTILIZING THE GRID ASSEMBLIES
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Patent #:
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Issue Dt:
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03/20/2012
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Application #:
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12689784
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Filing Dt:
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01/19/2010
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Publication #:
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Pub Dt:
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02/03/2011
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Title:
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CONDUCTIVE SEAL RING ELECTROSTATIC CHUCK
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Patent #:
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Issue Dt:
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08/12/2014
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Application #:
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13412119
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Filing Dt:
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03/05/2012
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Publication #:
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Pub Dt:
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03/14/2013
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Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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07/15/2014
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Application #:
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13448769
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Filing Dt:
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04/17/2012
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Publication #:
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Pub Dt:
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09/20/2012
| | | | |
Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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13764110
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Filing Dt:
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02/11/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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07/22/2014
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13764142
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Filing Dt:
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02/11/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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03/17/2015
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Application #:
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13764160
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Filing Dt:
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02/11/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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12/01/2015
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Application #:
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13764177
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Filing Dt:
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02/11/2013
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Publication #:
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Pub Dt:
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09/05/2013
| | | | |
Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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Issue Dt:
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02/03/2015
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13767459
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Filing Dt:
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02/14/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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Issue Dt:
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06/30/2015
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13787032
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03/06/2013
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Publication #:
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Pub Dt:
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09/05/2013
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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08/11/2015
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13787153
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03/06/2013
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Pub Dt:
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08/21/2014
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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04/08/2014
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13829324
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03/14/2013
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Pub Dt:
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09/05/2013
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Issue Dt:
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05/17/2016
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14014040
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08/29/2013
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12/26/2013
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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06/14/2016
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14034164
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09/23/2013
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04/03/2014
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Title:
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Method for Dicing a Substrate with Back Metal
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12/01/2015
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14176747
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02/10/2014
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06/05/2014
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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07/14/2015
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14201409
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03/07/2014
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Publication #:
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Pub Dt:
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08/28/2014
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Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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01/09/2018
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14697441
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04/27/2015
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Pub Dt:
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10/29/2015
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Title:
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WAFER STAGE FOR SYMMETRIC WAFER PROCESSING
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Patent #:
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Issue Dt:
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11/15/2016
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14721443
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05/26/2015
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Publication #:
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Pub Dt:
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09/10/2015
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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Issue Dt:
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12/01/2015
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14728517
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06/02/2015
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Publication #:
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Pub Dt:
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09/24/2015
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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Issue Dt:
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03/14/2017
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14854127
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Filing Dt:
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09/15/2015
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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Issue Dt:
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02/07/2017
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Application #:
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14974840
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12/18/2015
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Publication #:
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Pub Dt:
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04/21/2016
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Title:
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METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
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Patent #:
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Issue Dt:
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01/09/2018
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Application #:
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15206300
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07/10/2016
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Title:
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POWERED ANODE FOR ION SOURCE FOR DLC AND REACTIVE PROCESSES
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Patent #:
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Issue Dt:
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03/06/2018
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15287412
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Filing Dt:
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10/06/2016
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Pub Dt:
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01/26/2017
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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Patent #:
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Issue Dt:
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07/18/2017
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15287501
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10/06/2016
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Publication #:
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Pub Dt:
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02/02/2017
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Title:
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Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
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