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Reel/Frame:042185/0957   Pages: 6
Recorded: 04/07/2017
Attorney Dkt #:41019-0011001
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE INVENTOR NAME. PREVIOUSLY RECORDED AT REEL: 041614 FRAME: 0175. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT .
Total properties: 1
1
Patent #:
Issue Dt:
06/18/2019
Application #:
15461610
Filing Dt:
03/17/2017
Publication #:
Pub Dt:
09/28/2017
Title:
TEMPERATURE CONTROLLER OF SEMICONDUCTOR WAFER AND TEMPERATURE CONTROL METHOD OF SEMICONDUCTOR WAFER
Assignor
1
Exec Dt:
02/15/2017
Assignee
1
.3-25-1, SHINOMIYA
HIRATSUKA-SHI, KANAGAWA, JAPAN 254-8543
Correspondence name and address
HYUN J. IN
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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