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Patent #:
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Issue Dt:
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07/03/1984
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Application #:
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06150532
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Filing Dt:
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05/16/1980
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Title:
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SPUTTER TARGET FOR USE IN A SPUTTER COATING SOURCE
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Patent #:
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Issue Dt:
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11/09/1982
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Application #:
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06150533
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Filing Dt:
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05/16/1980
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Title:
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END POINT DETECTION METHOD FOR PHYSICAL ETCHING PROCESS
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Patent #:
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Issue Dt:
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01/04/1983
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Application #:
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06164415
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Filing Dt:
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06/30/1980
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Title:
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UNITARY ELECTROMAGNET FOR DOUBLE DEFLECTION SCANNING OF CHARGED PARTICLE BEAM
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Patent #:
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Issue Dt:
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01/25/1983
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Application #:
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06176171
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Filing Dt:
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08/07/1980
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Title:
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MULTIPLE THREADED FASTENER ASSEMBLY
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Patent #:
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Issue Dt:
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05/10/1983
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Application #:
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06264498
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Filing Dt:
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05/18/1981
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Title:
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PARTICLE BEAM ACCELERATOR
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Patent #:
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Issue Dt:
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06/05/1984
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Application #:
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06284915
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Filing Dt:
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07/20/1981
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Title:
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TEMPERATURE CONTROL OF A WORKPIECE UNDER ION IMPLANTATION
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Patent #:
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Issue Dt:
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10/25/1983
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Application #:
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06293026
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Filing Dt:
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08/14/1981
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Title:
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DUAL FILAMENT ION SOURCE
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Patent #:
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Issue Dt:
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01/03/1984
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Application #:
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06299681
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Filing Dt:
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09/08/1981
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Title:
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HYBRID MOVING STAGE AND RASTERED ELECTRON BEAM LITHOGRAPHY SYSTEM EMPLOYING APPROXIMATE CORRECTION CIRCUIT
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Patent #:
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Issue Dt:
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02/21/1984
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Application #:
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06306056
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Filing Dt:
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09/28/1981
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Title:
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BEAM SHARING METHOD AND APPARATUS FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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02/21/1984
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Application #:
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06309156
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Filing Dt:
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10/05/1981
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Title:
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PATTERN DATA HANDLING SYSTEM FOR AN ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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04/23/1985
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Application #:
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06343794
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Filing Dt:
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01/29/1982
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Title:
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APPARATUS FOR THERMAL TREATMENT OF SEMICONDUCTOR WAFERS BY GAS CONDUCTION INCORPORATING PERIPHERAL GAS INLET
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Patent #:
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Issue Dt:
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05/15/1984
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Application #:
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06349293
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Filing Dt:
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02/16/1982
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Title:
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DOSE COMPENSATION BY DIFFERENTIAL PATTERN SCANNING
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Patent #:
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Issue Dt:
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12/20/1983
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Application #:
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06349742
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Filing Dt:
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02/18/1982
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Title:
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BEAM SCANNING METHOD AND APPARATUS FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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09/04/1984
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Application #:
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06354822
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Filing Dt:
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03/04/1982
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Title:
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CHARGED PARTICLE BEAM EXPOSURE SYSTEM UTILIZING VARIABLE LINE SCAN
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Patent #:
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Issue Dt:
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07/14/1987
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Application #:
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06366433
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Filing Dt:
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04/07/1982
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Title:
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METHOD OF THERMAL TREATMENT OF A WAFER IN AN EVACUATED ENVIRONMENT
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Patent #:
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Issue Dt:
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05/22/1984
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Application #:
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06381085
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Filing Dt:
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05/24/1982
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Title:
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WAFER TRANSFER SYSTEM
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Patent #:
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Issue Dt:
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03/12/1985
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Application #:
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06381289
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Filing Dt:
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05/24/1982
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Title:
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AIR LOCK VACUUM PUMPING METHODS AND APPARATUS
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Patent #:
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Issue Dt:
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04/23/1985
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Application #:
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06381290
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Filing Dt:
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05/24/1982
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Title:
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MISSING OR BROKEN WAFER SENSOR
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Patent #:
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Issue Dt:
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07/03/1984
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Application #:
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06381669
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Filing Dt:
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05/25/1982
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Title:
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APPARATUS FOR GAS-ASSISTED, SOLID-TO-SOLID THERMAL TRANSFER WITH A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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07/10/1984
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Application #:
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06381670
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Filing Dt:
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05/25/1982
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Title:
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OPTIMUM SURFACE CONTOUR FOR CONDUCTIVE HEAT TRANSFER WITH A THIN FLEXIBLE WORKPIECE
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Patent #:
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Issue Dt:
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02/21/1984
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Application #:
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06382852
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Filing Dt:
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05/28/1982
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Title:
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BLACKBODY RADIATION SOURCE FOR PRODUCING CONSTANT PLANNAR ENERGY FLUX
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Patent #:
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Issue Dt:
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05/07/1985
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Application #:
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06397962
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Filing Dt:
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07/14/1982
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Title:
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ION CHAMBER FOR ELECTRON-BOMBARDMENT ION SOURCES
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Patent #:
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Issue Dt:
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10/02/1984
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Application #:
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06412455
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Filing Dt:
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08/27/1982
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Title:
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METHOD FOR REFLOW OF PHOSPHOSILICATE GLASS
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Patent #:
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Issue Dt:
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07/09/1985
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Application #:
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06435177
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Filing Dt:
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10/19/1982
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Title:
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GAP CONTROL SYSTEM FOR LOCALIZED VACUUM PROCESSING
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Patent #:
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Issue Dt:
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11/08/1983
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Application #:
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06439681
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Filing Dt:
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11/05/1982
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Title:
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MAGNETIC TARGETS FOR USE IN SPUTTER COATING APPARATUS
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Patent #:
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Issue Dt:
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07/25/1989
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Application #:
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06443080
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Filing Dt:
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11/19/1982
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Title:
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METHOD FOR PHOTORESIST PRETREATMENT PRIOR TO CHARGED PARTICLE BEAM PROCESSING
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Patent #:
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Issue Dt:
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05/14/1985
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Application #:
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06445353
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Filing Dt:
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11/29/1982
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Title:
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METAL-CONTAINING ORGANIC PHOTORESISTS
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Patent #:
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Issue Dt:
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07/31/1984
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Application #:
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06450819
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Filing Dt:
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12/20/1982
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Title:
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APPARATUS FOR ENHANCED NEUTRALIZATION OF POSITIVELY CHARGED ION BEAM
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Patent #:
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Issue Dt:
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06/12/1984
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Application #:
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06471577
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Filing Dt:
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03/03/1983
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Title:
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METHODS FOR CONDUCTING ELECTRON BEAM LITHOGRAPHY
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Patent #:
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Issue Dt:
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12/04/1984
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Application #:
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06481205
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Filing Dt:
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05/10/1983
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Title:
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BLACKBODY RADIATION SOURCE WITH CONSTANT PLANAR ENERGY FLUX
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Patent #:
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Issue Dt:
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02/18/1986
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Application #:
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06497291
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Filing Dt:
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05/23/1983
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Title:
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SCALING CIRCUIT FOR REMOTE MEASUREMENT SYSTEM
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Patent #:
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Issue Dt:
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09/17/1985
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Application #:
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06502812
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Filing Dt:
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06/09/1983
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Title:
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METHODS AND APPARATUS FOR GAS-ASSISTED THERMAL TRANSFER WITH A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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02/19/1985
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Application #:
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06515247
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Filing Dt:
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07/19/1983
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Title:
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DISK OR WAFER HANDLING AND COATING SYSTEM
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Patent #:
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Issue Dt:
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10/01/1985
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Application #:
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06518167
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Filing Dt:
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07/28/1983
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Title:
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MULTI-GAP MAGNETIC IMAGING LENS FOR CHARGED PARTICLE BEAMS
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Patent #:
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Issue Dt:
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10/02/1984
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Application #:
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06520765
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Filing Dt:
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08/08/1983
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Title:
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RAPID PUMPDOWN FOR HIGH VACUUM PROCESSING
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Patent #:
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Issue Dt:
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03/03/1987
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Application #:
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06523817
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Filing Dt:
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08/15/1983
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Title:
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WAFER COATING SYSTEM
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Patent #:
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Issue Dt:
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03/05/1985
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Application #:
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06527140
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Filing Dt:
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08/29/1983
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Title:
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PROCESS FOR HIGH TEMPERATURE DRIVE-IN DIFFUSION OF DOPANTS INTO SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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06/18/1985
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Application #:
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06533822
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Filing Dt:
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09/19/1983
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Title:
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LOCALIZED VACUUM PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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12/24/1985
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Application #:
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06533823
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Filing Dt:
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09/19/1983
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Title:
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APPARATUS FOR POSITIONING A WORKPIECE IN A LOCALIZED VACUUM PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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07/29/1986
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Application #:
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06534949
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Filing Dt:
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09/22/1983
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Title:
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MULTIPLE WAFER HOLDER FOR A WAFER TRANSFER SYSTEM
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Patent #:
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Issue Dt:
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04/23/1985
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Application #:
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06534950
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Filing Dt:
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09/22/1983
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|
Title:
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METHOD FOR REDUCING PHOSPHOROUS CONTAMINATION IN A VACUUM PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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05/28/1985
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Application #:
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06561692
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Filing Dt:
|
12/15/1983
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|
Title:
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FERROMAGNETIC FILMS FOR HIGH DENSITY RECORDING AND METHODS OF PRODUCTION
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Patent #:
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|
Issue Dt:
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11/12/1985
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Application #:
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06568175
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Filing Dt:
|
01/05/1984
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|
Title:
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WAFER HOLDING APPARATUS FOR ION IMPLANTATION
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|
|
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Patent #:
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|
Issue Dt:
|
08/27/1985
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Application #:
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06585743
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Filing Dt:
|
03/02/1984
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|
Title:
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METHOD FOR CONDUCTIVE HEAT TRANSFER WITH A THIN FLEXIBLE WORKPIECE
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|
|
|
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Patent #:
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|
Issue Dt:
|
04/02/1985
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Application #:
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06585819
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Filing Dt:
|
03/02/1984
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|
Title:
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METHOD FOR GAS-ASSISTED, SOLID-TO-SOLID THERMAL TRANSFER WITH A SEMICONDUCTOR WAFER
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|
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Patent #:
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|
Issue Dt:
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08/20/1985
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Application #:
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06606051
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Filing Dt:
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05/02/1984
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Title:
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METHOD AND APPARATUS FOR CONTROLLING THERMAL TRANSFER IN A CYCLIC VACUUM PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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07/09/1985
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Application #:
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06606052
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Filing Dt:
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05/02/1984
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Title:
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APPARATUS FOR CONTROLLING THERMAL TRANSFER IN A CYCLIC VACUUM PROCESSING SYSTEM
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Patent #:
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Issue Dt:
|
06/17/1986
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Application #:
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06611435
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Filing Dt:
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05/17/1984
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Title:
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APPARATUS FOR AND THE METHOD OF CONTROLLING MAGNETRON SPUTTER DEVICE HAVING SEPARATE CONFINING MAGNETIC FIELDS TO SEPARATE TARGETS SUBJECT TO SEPARATE DISCHARGES
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Patent #:
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Issue Dt:
|
08/20/1985
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Application #:
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06631527
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Filing Dt:
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07/18/1984
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Title:
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OPTIMUM SURFACE CONTOUR FOR CONDUCTIVE HEAT TRANSFER WITH A THIN FLEXIBLE WORKPIECE
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|
|
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Patent #:
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|
Issue Dt:
|
05/21/1985
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Application #:
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06634175
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Filing Dt:
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07/24/1984
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Title:
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WAFER TRANSPORT SYSTEM
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Patent #:
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Issue Dt:
|
08/26/1986
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Application #:
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06650014
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Filing Dt:
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09/13/1984
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Title:
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DUAL FILAMENT ION SOURCE WITH IMPROVED BEAM CHARACTERISTICS
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Patent #:
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Issue Dt:
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01/06/1987
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Application #:
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06680202
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Filing Dt:
|
12/10/1984
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Title:
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WAFER TRANSFER SYSTEM
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Patent #:
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Issue Dt:
|
08/19/1986
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Application #:
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06701439
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Filing Dt:
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02/12/1985
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY MACHINE INCORPORATING LOCALIZED VACUUM ENVELOPE
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Patent #:
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|
Issue Dt:
|
10/06/1987
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Application #:
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06701711
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Filing Dt:
|
02/14/1985
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Title:
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HIGH SPEED PATTERN GENERATOR FOR ELECTRON BEAM LITHOGRAPHY
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Patent #:
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Issue Dt:
|
12/22/1987
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Application #:
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06707995
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Filing Dt:
|
03/04/1985
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Title:
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FERROMAGNETIC FILMS FOR HIGH DENSITY RECORDING AND METHODS OF PRODUCTION
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|
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Patent #:
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|
Issue Dt:
|
04/22/1986
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Application #:
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06708104
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Filing Dt:
|
03/05/1985
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Title:
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ENVELOPE APPARATUS FOR LOCALIZED VACUUM PROCESSING
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Patent #:
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|
Issue Dt:
|
04/28/1987
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Application #:
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06737840
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Filing Dt:
|
05/28/1985
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Title:
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APPARATUS FOR SCANNING A HIGH CURRENT ION BEAM WITH A CONSTANT ANGLE OF INCIDENCE
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Patent #:
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Issue Dt:
|
02/04/1986
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Application #:
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06743196
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Filing Dt:
|
06/10/1985
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|
Title:
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METHOD AND APPARATUS FOR CONTROLLING THERMAL TRANSFER IN A CYCLIC VACUUM PROCESSING SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/08/1987
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Application #:
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06759464
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Filing Dt:
|
07/26/1985
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|
Title:
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CHARGE CONVERSION UNIT FOR NEGATIVE ION SOURCE
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|
|
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Patent #:
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|
Issue Dt:
|
11/04/1986
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Application #:
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06766458
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Filing Dt:
|
08/19/1985
|
|
Title:
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VACUUM PICK FOR SEMICONDUCTOR WAFERS
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Patent #:
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|
Issue Dt:
|
04/28/1987
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Application #:
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06785418
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Filing Dt:
|
10/08/1985
|
|
Title:
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METHOD FOR DOPING SEMICONDUCTOR WAFERS BY RAPID THERMAL PROCESSING OF SOLID PLANAR DIFFUSION SOURCES
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|
|
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Patent #:
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|
Issue Dt:
|
08/19/1986
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Application #:
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06811306
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Filing Dt:
|
12/16/1985
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|
Title:
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MAGNETRON SPUTTER DEVICE HAVING PLANAR AND CURVED TARGETS
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|
|
|
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Patent #:
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|
Issue Dt:
|
09/27/1988
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Application #:
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06835072
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Filing Dt:
|
02/28/1986
|
|
Title:
|
INVERTED RE-ENTRANT MAGNETRON ION SOURCE
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/14/1987
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Application #:
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06856430
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Filing Dt:
|
04/18/1986
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|
Title:
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TARGETS FOR MAGNETRON SPUTTER DEVICE HAVING SEPARATE CONFINING MAGNETIC FIELDS TO SEPARATE TARGETS SUBJECT TO SEPARATE DISCHARGES
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/29/1987
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Application #:
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06856876
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Filing Dt:
|
04/28/1986
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Title:
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GATE VALVE FOR WAFER PROCESSING SYSTEM
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Patent #:
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Issue Dt:
|
06/09/1987
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Application #:
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06864097
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Filing Dt:
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05/16/1986
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Title:
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LOW COMPLIANCE SEAL FOR GAS-ENHANCED WAFER COOLING IN VACUUM
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Patent #:
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Issue Dt:
|
06/14/1988
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Application #:
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06864584
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Filing Dt:
|
05/16/1986
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Title:
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DOSE MEASUREMENT AND UNIFORMITY MONITORING SYSTEM FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
|
05/17/1988
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Application #:
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06899966
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Filing Dt:
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08/25/1986
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Title:
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ION BEAM FAST PARALLEL SCANNING HAVING DIPOLE MAGNETIC LENS WITH NONUNIFORM FIELD
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Patent #:
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Issue Dt:
|
02/23/1988
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Application #:
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06921435
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Filing Dt:
|
10/22/1986
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Title:
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LINEAR GAS BEARING WITH INTEGRAL VACUUM SEAL FOR USE IN SERIAL PROCESS ION IMPLANTATION EQUIPMENT
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|
|
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Patent #:
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Issue Dt:
|
05/17/1988
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Application #:
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06922319
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Filing Dt:
|
10/23/1986
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Title:
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ION IMPLANTATION WITH VARIABLE IMPLANT ANGLE
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Patent #:
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Issue Dt:
|
02/09/1988
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Application #:
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06934011
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Filing Dt:
|
11/24/1986
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|
Title:
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METHOD AND APPARATUS FOR ION BEAM CENTROID LOCATION
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|
|
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Patent #:
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|
Issue Dt:
|
10/04/1988
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Application #:
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07000703
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Filing Dt:
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01/06/1987
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Title:
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THREATING WORKPIECES WITH BEAMS
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Patent #:
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Issue Dt:
|
01/10/1989
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Application #:
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07003516
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Filing Dt:
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01/15/1987
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Title:
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RAPID THERMAL CVD APPARATUS
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Patent #:
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Issue Dt:
|
05/17/1988
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Application #:
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07032204
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Filing Dt:
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03/30/1987
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Title:
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LOW DEFLECTION FORCE SENSITIVE PICK
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Patent #:
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Issue Dt:
|
04/04/1989
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Application #:
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07046230
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Filing Dt:
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05/04/1987
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Title:
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APPARATUS FOR RETAINING WAFERS
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Patent #:
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Issue Dt:
|
12/13/1988
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Application #:
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07051076
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Filing Dt:
|
05/15/1987
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Title:
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VAPORIZER SYSTEM FOR ION SOURCE
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|
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Patent #:
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Issue Dt:
|
01/05/1988
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Application #:
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07051269
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Filing Dt:
|
05/04/1987
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Title:
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PLATEN AND BEAM SETUP FLAG ASSEMBLY FOR ION IMPLANTER
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Patent #:
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Issue Dt:
|
05/10/1988
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Application #:
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07072194
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Filing Dt:
|
07/10/1987
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Title:
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METHOD OF THERMAL TREATMENT OF A WAFER IN AN EVACUATED ENVIROMENT
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|
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Patent #:
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Issue Dt:
|
06/06/1989
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Application #:
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07135568
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Filing Dt:
|
12/21/1987
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Title:
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WAFER TRANSFER SYSTEM
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|
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Patent #:
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Issue Dt:
|
05/01/1990
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Application #:
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07138925
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Filing Dt:
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11/06/1987
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Title:
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ION BEAM SCANNING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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05/23/1989
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Application #:
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07141709
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Filing Dt:
|
01/07/1988
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Title:
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METHODS AND APPARATUS FOR THERMAL TRANSFER WITH A SEMICONDUCTOR WAFER IN VACUUM
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|
|
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Patent #:
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Issue Dt:
|
06/18/1991
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Application #:
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07183013
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Filing Dt:
|
06/01/1988
|
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Title:
|
WAFER COATING SYSTEM
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|
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Patent #:
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|
Issue Dt:
|
07/25/1989
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Application #:
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07202748
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Filing Dt:
|
06/03/1988
|
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Title:
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COMPENSATED SCAN WAVE FORM GENERATOR FOR ION IMPLANTATION EQUIPMENT
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|
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Patent #:
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Issue Dt:
|
06/06/1989
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Application #:
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07203009
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Filing Dt:
|
06/06/1988
|
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Title:
|
METHOD AND APPARATUS FOR VENTING VACUUM PROCESSING EQUIPMENT
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|
|
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Patent #:
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Issue Dt:
|
10/30/1990
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Application #:
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07230636
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Filing Dt:
|
08/10/1988
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Title:
|
BUS DRIVING AND DECODING CIRCUIT
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|
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Patent #:
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Issue Dt:
|
05/22/1990
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Application #:
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07290889
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Filing Dt:
|
12/22/1988
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Title:
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HORIZONTAL LAMINAR AIR FLOW WORK STATION
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|
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Patent #:
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|
Issue Dt:
|
02/27/1990
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Application #:
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07326398
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Filing Dt:
|
03/21/1989
|
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Title:
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ISOLATION VALVE FOR VACUUM AND NON-VACUUM APPLICATION
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|
|
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Patent #:
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|
Issue Dt:
|
02/26/1991
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Application #:
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07355713
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Filing Dt:
|
05/22/1989
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|
Title:
|
SPUTTERING APPARATUS WITH A ROTATING MAGNET ARRAY HAVING A GEOMETRY FOR SPECIFIED TARGET EROSION PROFILE
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|
|
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Patent #:
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|
Issue Dt:
|
04/17/1990
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Application #:
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07358461
|
Filing Dt:
|
05/26/1989
|
|
Title:
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MODULAR WAFER TRANSPORT AND PROCESSING SYSTEM
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|
|
|
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Patent #:
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|
Issue Dt:
|
02/06/1990
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Application #:
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07366202
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Filing Dt:
|
06/09/1989
|
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Title:
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DISK SCANNING APPARATUS FOR BATCH ION IMPLANTERS
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|
|
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Patent #:
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|
Issue Dt:
|
02/27/1990
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Application #:
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07367122
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Filing Dt:
|
06/16/1989
|
|
Title:
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WARPING YARN ACCUMULATOR
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|
|
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Patent #:
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|
Issue Dt:
|
10/23/1990
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Application #:
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07407855
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Filing Dt:
|
09/15/1989
|
|
Title:
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DISK SCANNING APPARATUS FOR BATCH ION IMPLANTERS
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|
|
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Patent #:
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|
Issue Dt:
|
03/05/1991
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Application #:
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07420668
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Filing Dt:
|
10/10/1989
|
|
Title:
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METHODS AND APPARATUS FOR FABRICATING A HIGH PURITY THERMALLY- CONDUCTIVE POLYMER LAYER
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|
|
|
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Patent #:
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|
Issue Dt:
|
07/03/1990
|
Application #:
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07427921
|
Filing Dt:
|
10/25/1989
|
|
Title:
|
METHODS FOR THERMAL TRANSFER WITH A SEMICONDUCTOR
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|
|
|
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Patent #:
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|
Issue Dt:
|
12/25/1990
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Application #:
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07432470
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Filing Dt:
|
11/07/1989
|
|
Title:
|
METHOD AND APPARATUS FOR HIGH EFFICIENCY SCANNING IN AN ION IMPLANTER
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|
|
|
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Patent #:
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|
Issue Dt:
|
08/20/1991
|
Application #:
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07488491
|
Filing Dt:
|
03/02/1990
|
|
Title:
|
APPARATUS FOR RETAINING WAFERS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/25/1990
|
Application #:
|
07492428
|
Filing Dt:
|
03/06/1990
|
|
Title:
|
APPARATUS FOR GENERATING HIGH CURRENTS OF NEGATIVE IONS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/1993
|
Application #:
|
07594528
|
Filing Dt:
|
10/05/1990
|
|
Title:
|
METHOD OF AND APPARATUS FOR NON-CONTACT TEMPERATURE MEASUREMENT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/17/1992
|
Application #:
|
07596119
|
Filing Dt:
|
10/11/1990
|
|
Title:
|
WAFER ARM HANDLER MECHANISM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/04/1992
|
Application #:
|
07646361
|
Filing Dt:
|
01/25/1991
|
|
Title:
|
CHARGE NEUTRALIZATION APPARATUS FOR ION IMPLANTATION SYSTEM
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|
