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101
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Patent #:
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Issue Dt:
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02/02/1988
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Application #:
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07076426
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Filing Dt:
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07/21/1987
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Title:
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HIGH VACUUM PUMPING SYSTEM
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Patent #:
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Issue Dt:
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09/22/1992
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Application #:
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07583826
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Filing Dt:
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09/17/1990
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Title:
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APPARATUS AND METHOD FOR THE TRANSFER AND DELIVERY OF HIGH PURITY CHEMICALS
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Patent #:
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Issue Dt:
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01/26/1993
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Application #:
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07750363
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Filing Dt:
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08/27/1991
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Title:
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ELECTRON BEAM GUN FOR USE IN AN ELECTRON BEAM EVAPORATION SOURCE
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Patent #:
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Issue Dt:
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12/21/1993
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Application #:
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07812785
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Filing Dt:
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12/23/1991
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Title:
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CAPACITANCE PRESSURE TANSDUCER
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Patent #:
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Issue Dt:
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07/19/1994
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Application #:
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07948392
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Filing Dt:
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09/21/1992
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Title:
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PROCESS AND APPARATUS FOR ELECTRONIC CONTROL OF THE TRANSFER AND DELIVERY OF HIGH PURITY CHEMICALS
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Patent #:
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Issue Dt:
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12/06/1994
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Application #:
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08035252
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Filing Dt:
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03/22/1993
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Title:
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PROCESS AND APPARATUS FOR PRECISE VOLUMETRIC DILUTING/MIXING OF CHEMICALS
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08180546
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Filing Dt:
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01/12/1994
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Title:
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POINT-OF-USE RECYCLING OF WAFER CLEANING SUBSTANCES
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Patent #:
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Issue Dt:
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05/23/1995
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Application #:
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08275958
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Filing Dt:
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07/15/1994
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Title:
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PROCESS AND APPARATUS FOR ELECTRONIC CONTROL OF THE TRANSFER AND DELIVERY OF HIGH PURITY CHEMICALS
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Patent #:
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Issue Dt:
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02/13/1996
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Application #:
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08349429
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Filing Dt:
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12/05/1994
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Title:
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PROCESS FOR PRECISE VOLUMETRIC DILUTING/MIXING OF CHEMICALS
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Patent #:
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Issue Dt:
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06/04/1996
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Application #:
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08355671
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Filing Dt:
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12/14/1994
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Title:
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APPARATUS FOR BLENDING AND CONTROLLING THE CONCENTRATION OF A LIQUID CHEMICAL IN A DILUENT LIQUID
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Patent #:
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Issue Dt:
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07/20/1999
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Application #:
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08395374
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Filing Dt:
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02/21/1995
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Title:
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CHEMICAL BLENDING SYSTEM WITH TITRATOR CONTROL
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Patent #:
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Issue Dt:
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12/02/1997
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Application #:
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08565741
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Filing Dt:
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11/30/1995
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Title:
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DISPLAY FORMING METHOD
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Patent #:
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Issue Dt:
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02/17/1998
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Application #:
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08592803
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Filing Dt:
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01/26/1996
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Title:
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METHOD FOR MINIMIZING WASTEWATER DISCHARGE
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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08679288
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Filing Dt:
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07/12/1996
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Title:
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PLASMA APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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07/07/1998
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Application #:
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08787691
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Filing Dt:
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01/23/1997
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Title:
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APPARATUS FOR MINIMIZING WASTEWATER DISCHARGE
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Patent #:
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Issue Dt:
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02/23/1999
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Application #:
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08789335
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Filing Dt:
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01/23/1997
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Title:
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TWO-STAGE CHEMICAL MIXING SYSTEM
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Patent #:
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Issue Dt:
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01/19/1999
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Application #:
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08871083
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Filing Dt:
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06/09/1997
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Title:
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ROD-FED ELECTRON BEAM EVAPORATION SYSTEM
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Patent #:
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Issue Dt:
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05/18/1999
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Application #:
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08880246
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Filing Dt:
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06/23/1997
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Title:
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FREE-STANDING ROTATIONAL ROD-FED SOURCE
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08898882
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Filing Dt:
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06/27/1997
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Title:
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APPARATUS AND METHOD FOR USE IN CHEMICAL-MECHANICAL POLISHING PROCEDURES
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Patent #:
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Issue Dt:
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09/14/1999
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Application #:
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08900524
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Filing Dt:
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07/25/1997
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Title:
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METHOD FOR MINIMIZING WASTEWATER DISCHARGE
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Patent #:
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Issue Dt:
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08/10/1999
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Application #:
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08928574
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Filing Dt:
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09/12/1997
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Title:
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UNWINDING OF PLASTIC FILM IN THE PRESENCE OF A PLASMA
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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08950150
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Filing Dt:
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10/14/1997
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Title:
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LIQUID DISPENSING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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03/30/1999
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Application #:
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08978887
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Filing Dt:
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11/26/1997
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Title:
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SLURRY MIXING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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06/20/2000
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Application #:
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08979496
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Filing Dt:
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11/26/1997
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Title:
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DISPENSING SYSTEM AND METHOD FOR DISENSING AN AQUEOUS SOLUTION
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Patent #:
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Issue Dt:
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01/25/2000
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Application #:
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09050259
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Filing Dt:
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03/30/1998
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Title:
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METHOD OF PROCESSING SEMICONDUCTOR MANUFACTURING EXHAUST GASES
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Patent #:
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Issue Dt:
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06/19/2001
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Application #:
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09198686
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Filing Dt:
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11/24/1998
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Title:
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METHOD FOR PRODUCING A LIQUID MIXTURE HAVING A PREDETERMINED CONCENTRATION OF A SPECIFIED COMPONENT
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09224607
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Filing Dt:
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12/31/1998
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Title:
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CHEMICAL DELIVERY SYSTEMS AND METHODS OF DELIVERY
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09294647
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Filing Dt:
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04/19/1999
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Title:
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VACUUM PUMP OIL DISTRIBUTION SYSTEM WITH INTEGRAL OIL PUMP
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09430724
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Filing Dt:
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10/29/1999
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Title:
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SPRING CLIP FOR SENSITIVE SUBSTRATES
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Patent #:
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Issue Dt:
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06/04/2002
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Application #:
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09464184
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Filing Dt:
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12/16/1999
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Title:
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EQUIPMENT SKID
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09479290
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Filing Dt:
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01/06/2000
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Title:
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APPARATUS FOR PRODUCING LIQUID MIXTURE HAVING PREDETERMINED CONCENTRATION OF A SPECIFIC COMPONENT
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09512752
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Filing Dt:
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02/25/2000
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Title:
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PRECISION LIQUID MIXING APPARATUS AND METHOD
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09545731
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Filing Dt:
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04/10/2000
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Title:
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ELECTRON BEAM GUN WITH GROUNDED SHIELD TO PREVENT ARC-DOWN AND GAS BLEED TO PROTECT THE FILAMENT
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09568926
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Filing Dt:
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05/11/2000
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Publication #:
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Pub Dt:
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05/31/2001
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Title:
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Chemical delivery systems and methods of delivery
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Patent #:
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Issue Dt:
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01/29/2002
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Application #:
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09584940
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06/01/2000
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Title:
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multiple pocket electron beam source
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Patent #:
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Issue Dt:
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05/27/2003
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09742135
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12/22/2000
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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OBJECT PLATING METHOD AND SYSTEM
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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09850166
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05/08/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
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PRECISION LIQUID MIXING APPARATUS AND METHOD
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Patent #:
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01/22/2002
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Application #:
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09870227
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05/30/2001
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09/27/2001
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Title:
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Chemical delivery systems and methods of delivery
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09/28/2004
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09876459
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06/07/2001
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03/21/2002
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Title:
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CONDUCTIVITY FEEDBACK CONTROL SYSTEM FOR SLURRY BLENDING
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05/11/2004
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09916062
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07/26/2001
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03/27/2003
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Title:
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ELECTROWINNING CELL INCORPORATING METAL ION FILTRATION APPARATUS
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01/13/2004
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09968566
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09/29/2001
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02/14/2002
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Title:
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CHEMICAL DELIVERY SYSTEMS AND METHODS OF DELIVERY
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06/07/2005
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09999199
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10/24/2001
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04/11/2002
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Title:
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MULTIPLE POCKET ELECTRON BEAM SOURCE
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12/28/2004
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10009710
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11/28/2001
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Title:
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ELECTROWINNING CELL INCORPORATING METAL ION FILTRATION APPARATUS
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03/30/2004
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10011508
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11/06/2001
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05/08/2003
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Title:
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METHODS FOR ANGLE LIMITING DEPOSITION MASK
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08/17/2004
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10031824
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01/18/2002
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WATER SOFTENING METHOD AND APPARATUS FOR USE THEREWITH
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03/09/2004
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10044047
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01/11/2002
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07/17/2003
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Title:
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VACUUM LOAD LOCK, SYSTEM INCLUDING VACUUM LOAD LOCK, AND ASSOCIATED METHODS
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Patent #:
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NONE
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Application #:
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10102351
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03/19/2002
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09/25/2003
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Title:
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Planetary lift-off vapor deposition system
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12/01/2009
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10148756
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09/03/2002
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11/06/2003
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Title:
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FLUORINE REMOVAL BY ION EXCHANGE
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08/03/2004
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10166469
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06/10/2002
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12/11/2003
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Title:
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FLOW-INDICATING DEVICE AND ASSOCIATED MECHANISM AND METHOD
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Patent #:
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05/23/2006
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10169316
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09/23/2002
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03/06/2003
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Title:
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METHOD AND APPARATUS FOR METAL REMOVAL ION EXCHANGE
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08/02/2005
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10215751
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08/09/2002
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03/27/2003
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Title:
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FLUSHING A MULTI-PORT VALVE MANIFOLD
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08/31/2004
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10215774
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08/09/2002
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04/24/2003
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Title:
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APPARATUS AND METHOD FOR SAMPLING A CHEMICAL-MECHANICAL POLISHING SLURRY
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09/14/2004
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10256861
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09/27/2002
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04/01/2004
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Title:
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PROCESS FOR STRIPPING AMINE BORANE COMPLEX FROM AN ELECTROLESS PLATING SOLUTION
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02/08/2005
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10303372
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11/25/2002
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05/27/2004
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ATMOSPHERIC ROBOT HANDLING EQUIPMENT
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09/20/2005
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10322238
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12/18/2002
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09/18/2003
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DILUTION APPARATUS AND METHOD OF DILUTING A LIQUID SAMPLE
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11/14/2006
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10364809
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02/11/2003
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08/12/2004
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SELF-MIXING TANK
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02/14/2006
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10380581
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05/05/2003
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11/20/2003
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Title:
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ELECTROPHORETIC CROSS-FLOW FILTRATION AND ELECTRODEIONIZATION: METHOD FOR TREATING EFFULUENT WASTE AND APPARATUS FOR USE THEREWITH
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03/07/2006
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10436349
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05/12/2003
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10/16/2003
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CHEMICAL MIX AND DELIVERY SYSTEMS AND METHODS THEREOF
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09/28/2004
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10460794
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06/12/2003
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Title:
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CONFIGURABLE PLC AND SCADA- BASED CONTROL SYSTEM
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NONE
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10601687
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06/23/2003
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12/23/2004
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Title:
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Method and apparatus for self-configuring supervisory control and data acquisition (SCADA) system for distributed control
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NONE
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10601689
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06/23/2003
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01/27/2005
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Title:
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Method and apparatus for providing a selectively isolated equipment area network for machine elements with data communication therebetween and with remote sites
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06/02/2009
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10621700
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07/17/2003
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05/06/2004
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VACUUM CHAMBER LOAD LOCK STRUCTURE AND ARTICLE TRANSPORT MECHANISM
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02/14/2006
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10650170
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08/27/2003
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03/03/2005
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SYSTEMS AND METHODS FOR MEASUREMENT OF LOW LIQUID FLOW RATES
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09/13/2005
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10749946
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12/31/2003
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06/30/2005
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Title:
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METHOD FOR TREATING METAL-CONTAINING SOLUTIONS
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NONE
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10749949
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12/31/2003
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Pub Dt:
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08/12/2004
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Title:
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CHEMICAL DELIVERY SYSTEMS AND METHODS OF DELIVERY
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12/20/2005
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10749950
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Filing Dt:
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12/31/2003
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Pub Dt:
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06/30/2005
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Title:
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TREATMENT PROCESS FOR INDUSTRIAL WASTE STREAM
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02/14/2006
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10749954
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Filing Dt:
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12/31/2003
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Publication #:
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Pub Dt:
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07/07/2005
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Title:
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SELECTIVE FLUORIDE AND AMMONIA REMOVAL BY CHROMATOGRAPHIC SEPARATION OF WASTEWATER
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10/09/2007
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10750309
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12/31/2003
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Pub Dt:
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07/07/2005
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Title:
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APPARATUS AND METHOD FOR CONTROL, PUMPING AND ABATEMENT FOR VACUUM PROCESS CHAMBERS
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NONE
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10750310
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Filing Dt:
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12/31/2003
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07/07/2005
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Title:
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Method and apparatus for high speed atomic layer deposition
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12/30/2008
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10759718
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01/16/2004
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09/30/2004
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Title:
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FLUORINE REMOVAL BY ION EXCHANGE
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NONE
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10774841
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02/09/2004
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08/11/2005
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Title:
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Barrier layer process and arrangement
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NONE
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10781993
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Filing Dt:
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02/19/2004
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08/25/2005
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Title:
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Active vibration reduction
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05/26/2009
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10816703
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04/02/2004
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10/13/2005
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Title:
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ACTIVE NOISE CANCELLATION SYSTEM, ARRANGEMENT, AND METHOD
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03/10/2009
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10822189
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04/09/2004
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10/13/2005
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Title:
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COMBINED VACUUM PUMP LOAD-LOCK ASSEMBLY
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11/28/2006
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10916081
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08/11/2004
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02/16/2006
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Title:
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INTEGRATED HIGH VACUUM PUMPING SYSTEM
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NONE
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10964414
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10/13/2004
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04/13/2006
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Title:
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System and methods for redundant networks
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11/28/2006
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10981226
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11/04/2004
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Pub Dt:
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05/04/2006
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Title:
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INTEGRATED TURBO/DRAG/REGENERATIVE PUMP WITH COUNTER-ROTATING TURBO BLADES
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04/04/2006
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11003125
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12/03/2004
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06/30/2005
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Title:
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FORE-LINE PRECONDITIONING FOR VACUUM PUMPS
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07/08/2008
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11029068
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01/04/2005
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07/06/2006
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Title:
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SYSTEMS AND METHODS FOR FACILITATING WIRELESS COMMUNICATION BETWEEN VARIOUS COMPONENTS OF A DISTRIBUTED SYSTEM
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NONE
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11088050
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03/23/2005
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09/28/2006
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Method and apparatus for generating a high pressure fluid
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NONE
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11145742
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06/06/2005
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12/07/2006
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Title:
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High efficiency trap for deposition process
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NONE
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11173962
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07/01/2005
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01/25/2007
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Integrated pump apparatus for semiconductor processing
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07/01/2008
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11182531
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07/15/2005
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01/18/2007
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ARRANGEMENT FOR TOOL EQUIPMENT
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07/29/2008
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11204615
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08/16/2005
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02/22/2007
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TURBOMOLECULAR PUMP WITH STATIC CHARGE CONTROL
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NONE
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11205564
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08/17/2005
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02/22/2007
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Title:
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Device having an embedded Ethernet networking automated link for facilitating configuration of the device and connection of the device to a network
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NONE
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11239968
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09/30/2005
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04/05/2007
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Vacuum handler systems and processes for flexible automation of semiconductor fabrication
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NONE
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11244744
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10/06/2005
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04/12/2007
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Pump apparatus for semiconductor processing
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10/21/2008
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11245797
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10/07/2005
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04/12/2007
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WIDE RANGE PRESSURE CONTROL USING TURBO PUMP
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NONE
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11252635
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10/18/2005
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04/19/2007
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Method and apparatus for producing ultra-high purity water
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NONE
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11283080
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11/18/2005
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03/30/2006
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Selective fluoride and ammonia removal by chromatographic separation of wastewater
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02/26/2013
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11285810
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11/23/2005
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12/31/2009
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Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system
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NONE
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11353906
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02/14/2006
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11/16/2006
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Electrophoretic cross-flow filtration and electrodeionization method for treating effluent waste and apparatus for use therewith
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12/12/2006
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11358412
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02/21/2006
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06/29/2006
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METHOD AND APPARATUS FOR METAL REMOVAL BY ION EXCHANGE
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10/12/2010
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11367140
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03/03/2006
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09/07/2006
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CONTROL OF FLUID CONDITIONS IN BULK FLUID DISTRIBUTION SYSTEMS
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NONE
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11367888
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03/03/2006
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09/07/2006
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Control of fluid conditions in bulk fluid distribution systems
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NONE
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11368288
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03/03/2006
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09/06/2007
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Liquid dispense system
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NONE
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11605793
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11/29/2006
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05/29/2008
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Inductively heated trap
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NONE
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11674253
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02/13/2007
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09/20/2007
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Method and Apparatus for Dispensing Liquid with Precise Control
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06/29/2010
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11732088
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04/02/2007
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10/11/2007
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METHOD AND APPARATUS FOR RECYCLING PROCESS FLUIDS
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NONE
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11788891
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04/23/2007
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11/01/2007
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Title:
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Fluid distribution system
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