Patent Assignment Details
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| Reel/Frame: | 015278/0974 | |
| Pages: | 2 |
| | Recorded: | 10/21/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
3
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Patent #:
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Issue Dt:
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09/27/2005
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Application #:
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09994279
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Filing Dt:
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11/26/2001
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Publication #:
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Pub Dt:
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06/06/2002
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Title:
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METHOD FOR INTEGRATED IN-SITU CLEANING AND SUBSEQUENT ATOMIC LAYER DEPOSITION WITHIN A SINGLE PROCESSING CHAMBER
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Patent #:
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Issue Dt:
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03/25/2008
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Application #:
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10137855
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Filing Dt:
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05/03/2002
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Publication #:
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Pub Dt:
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11/07/2002
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Title:
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CONTINUOUS METHOD FOR DEPOSITING A FILM BY MODULATED ION-INDUCED ATOMIC LAYER DEPOSITION (MII-ALD)
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10215711
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Filing Dt:
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08/08/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
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Assignee
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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PATENT LAW GROUP LLP
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BRIAN D. OGONOWSKY
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2635 NORTH FIRST STREET
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SUITE 223
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SAN JOSE, CA 95134
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