Patent Assignment Details
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Reel/Frame: | 041180/0989 | |
| Pages: | 2 |
| | Recorded: | 02/06/2017 | | |
Attorney Dkt #: | KLA-093 (P4988) |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/27/2018
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Application #:
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15418946
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Filing Dt:
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01/30/2017
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Publication #:
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Pub Dt:
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03/29/2018
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Title:
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MEASUREMENT OF OVERLAY AND EDGE PLACEMENT ERRORS WITH AN ELECTRON BEAM COLUMN ARRAY
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Assignee
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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JOSEPH S SPANO
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851 BURLWAY ROAD, SUITE 407
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BURLINGAME, CA 94010
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05/29/2024 06:53 PM
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