Patent Assignment Details
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| Reel/Frame: | 011362/0990 | |
| Pages: | 2 |
| | Recorded: | 12/11/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09734307
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Filing Dt:
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12/11/2000
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Publication #:
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Pub Dt:
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06/13/2002
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Title:
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IN-LINE METHOD OF MEASURING EFFECTIVE THREE-LEAF ABERRATION COEFFICIENT OF LITHOGRAPHY PROJECTION SYSTEMS
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Assignee
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| 8000 SOUTH FEDERAL WAY |
| BOISE, IDAHO 83707 |
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Correspondence name and address
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KNOBBE, MARTERS, OLSON & BEAR, LLP
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ADEEL S. AKHTAR
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620 NEWPORT CENTER DRIVE
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SIXTEENTH FLOOR
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NEWPORT BEACH, VA 92660
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