Patent Assignment Details
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Reel/Frame: | 013579/0991 | |
| Pages: | 4 |
| | Recorded: | 12/12/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10319337
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Filing Dt:
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12/12/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Title:
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HIGH-LUMINOSITY EUV-SOURCE DEVICES FOR USE IN EXTREME ULTRAVIOLET (SOFT X-RAY) LITHOGRAPHY SYSTEMS AND OTHER EUV OPTICAL SYSTEMS
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Assignee
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2-3 MARUNOUCHI 3-CHOME CHIYODA-KU |
TOKYO 100-8331, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN LLP
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DONALD L. STEPHENS JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S.W. SALMON STREET
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PORTLAND, OR 97204-2988
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