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Reel/Frame:	060201/0991			Pages:	5
		Recorded:	05/26/2022
Attorney Dkt #:	AKR-GEN
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 43

Patent #:	6684890	Issue Dt:	02/03/2004	Application #:	09906384	Filing Dt:	07/16/2001
Publication #:	US20030015216	Pub Dt:	01/23/2003
Title:	MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID

Patent #:	6799588	Issue Dt:	10/05/2004	Application #:	10031923	Filing Dt:	04/17/2002
Title:	APPARATUS FOR TREATING SUBSTRATES

Patent #:	7287537	Issue Dt:	10/30/2007	Application #:	10059682	Filing Dt:	01/29/2002
Publication #:	US20030141784	Pub Dt:	07/31/2003
Title:	MEGASONIC PROBE ENERGY DIRECTOR

Patent #:	6837944	Issue Dt:	01/04/2005	Application #:	10091011	Filing Dt:	03/04/2002
Publication #:	US20030019507	Pub Dt:	01/30/2003
Title:	CLEANING AND DRYING METHOD AND APPARATUS

Patent #:	6722056	Issue Dt:	04/20/2004	Application #:	10098847	Filing Dt:	03/15/2002
Publication #:	US20020129513	Pub Dt:	09/19/2002
Title:	DRYING VAPOR GENERATION

Patent #:	6766818	Issue Dt:	07/27/2004	Application #:	10117725	Filing Dt:	04/05/2002
Publication #:	US20020144727	Pub Dt:	10/10/2002
Title:	CHEMICAL CONCENTRATION CONTROL DEVICE

Patent #:	7185661	Issue Dt:	03/06/2007	Application #:	10140029	Filing Dt:	05/06/2002
Publication #:	US20030205238	Pub Dt:	11/06/2003
Title:	RECIPROCATING MEGASONIC PROBE

Patent #:	6754980	Issue Dt:	06/29/2004	Application #:	10171426	Filing Dt:	06/12/2002
Publication #:	US20020185152	Pub Dt:	12/12/2002
Title:	MEGASONIC CLEANER AND DRYER

Patent #:	6923192	Issue Dt:	08/02/2005	Application #:	10171429	Filing Dt:	06/12/2002
Publication #:	US20020185153	Pub Dt:	12/12/2002
Title:	STACKABLE PROCESS CHAMBERS

Patent #:	6928751	Issue Dt:	08/16/2005	Application #:	10171430	Filing Dt:	06/12/2002
Publication #:	US20020185154	Pub Dt:	12/12/2002
Title:	MEGASONIC CLEANER AND DRYER SYSTEM

Patent #:	6907890	Issue Dt:	06/21/2005	Application #:	10358636	Filing Dt:	02/05/2003
Publication #:	US20030145874	Pub Dt:	08/07/2003
Title:	CAPILLARY DRYING OF SUBSTRATES

Patent #:	7976718	Issue Dt:	07/12/2011	Application #:	10585229	Filing Dt:	04/20/2007
Publication #:	US20080035609	Pub Dt:	02/14/2008
Title:	SYSTEM AND METHOD FOR SELECTIVE ETCHING OF SILICON NITRIDE DURING SUBSTRATE PROCESSING

Patent #:	6955727	Issue Dt:	10/18/2005	Application #:	10699042	Filing Dt:	10/31/2003
Publication #:	US20040149308	Pub Dt:	08/05/2004
Title:	SUBSTRATE PROCESS TANK WITH ACOUSTICAL SOURCE TRANSMISSION AND METHOD OF PROCESSING SUBSTRATES

Patent #:	7047989	Issue Dt:	05/23/2006	Application #:	10742214	Filing Dt:	12/19/2003
Publication #:	US20040139982	Pub Dt:	07/22/2004
Title:	SONIC-ENERGY CLEANER SYSTEM WITH GASIFIED FLUID

Patent #:	7100304	Issue Dt:	09/05/2006	Application #:	10864927	Filing Dt:	06/10/2004
Publication #:	US20040221473	Pub Dt:	11/11/2004
Title:	MEGASONIC CLEANER AND DRYER

Patent #:	7156111	Issue Dt:	01/02/2007	Application #:	10864929	Filing Dt:	06/10/2004
Publication #:	US20050161059	Pub Dt:	07/28/2005
Title:	MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION

Patent #:	7311847	Issue Dt:	12/25/2007	Application #:	10895511	Filing Dt:	07/20/2004
Publication #:	US20050016929	Pub Dt:	01/27/2005
Title:	SYSTEM AND METHOD FOR POINT-OF-USE FILTRATION AND PURIFICATION OF FLUIDS USED IN SUBSTRATE PROCESSING

Patent #:	7169253	Issue Dt:	01/30/2007	Application #:	10909764	Filing Dt:	08/02/2004
Publication #:	US20050026435	Pub Dt:	02/03/2005
Title:	PROCESS SEQUENCE FOR PHOTORESIST STRIPPING AND/OR CLEANING OF PHOTOMASKS FOR INTEGRATED CIRCUIT MANUFACTURING

Patent #:	6928750	Issue Dt:	08/16/2005	Application #:	10951009	Filing Dt:	09/27/2004
Publication #:	US20050087303	Pub Dt:	04/28/2005
Title:	MEMBRANE DRYER

Patent #:	7578302	Issue Dt:	08/25/2009	Application #:	11595029	Filing Dt:	11/09/2006
Publication #:	US20070056605	Pub Dt:	03/15/2007
Title:	MEGASONIC CLEANING USING SUPERSATURATED SOLUTION

Patent #:	7644512	Issue Dt:	01/12/2010	Application #:	11624445	Filing Dt:	01/18/2007
Title:	SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE

Patent #:	7784478	Issue Dt:	08/31/2010	Application #:	11625556	Filing Dt:	01/22/2007
Publication #:	US20070169800	Pub Dt:	07/26/2007
Title:	ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES

Patent #:	7946299	Issue Dt:	05/24/2011	Application #:	11745866	Filing Dt:	05/08/2007
Publication #:	US20070261716	Pub Dt:	11/15/2007
Title:	SPRAY JET CLEANING APPARATUS AND METHOD

Patent #:	7614406	Issue Dt:	11/10/2009	Application #:	11873750	Filing Dt:	10/17/2007
Publication #:	US20080264442	Pub Dt:	10/30/2008
Title:	METHOD OF CLEANING SUBSTRATES UTILIZING MEGASONIC ENERGY

Patent #:	8741066	Issue Dt:	06/03/2014	Application #:	12070620	Filing Dt:	02/19/2008
Publication #:	US20110306210	Pub Dt:	12/15/2011
Title:	Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting

Patent #:	8279712	Issue Dt:	10/02/2012	Application #:	12266543	Filing Dt:	11/06/2008
Publication #:	US20090231959	Pub Dt:	09/17/2009
Title:	COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME

Patent #:	9070722	Issue Dt:	06/30/2015	Application #:	12445783	Filing Dt:	10/05/2010
Publication #:	US20110041871	Pub Dt:	02/24/2011
Title:	SYSTEM AND METHOD FOR THE SONIC-ASSISTED CLEANING OF SUBSTRATES UTILIZING A SONIC-TREATED LIQUID

Patent #:	8056253	Issue Dt:	11/15/2011	Application #:	12685935	Filing Dt:	01/12/2010
Publication #:	US20100293806	Pub Dt:	11/25/2010
Title:	SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE

Patent #:	8987032	Issue Dt:	03/24/2015	Application #:	12716785	Filing Dt:	03/03/2010
Publication #:	US20100227432	Pub Dt:	09/09/2010
Title:	METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICON

Patent #:	8316869	Issue Dt:	11/27/2012	Application #:	12871286	Filing Dt:	08/30/2010
Publication #:	US20100326464	Pub Dt:	12/30/2010
Title:	ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES

Patent #:	8084280	Issue Dt:	12/27/2011	Application #:	12898374	Filing Dt:	10/05/2010
Publication #:	US20110111548	Pub Dt:	05/12/2011
Title:	METHOD OF MANUFACTURING A SOLAR CELL USING A PRE-CLEANING STEP THAT CONTRIBUTES TO HOMOGENEOUS TEXTURE MORPHOLOGY

Patent #:	8276291	Issue Dt:	10/02/2012	Application #:	13296760	Filing Dt:	11/15/2011
Publication #:	US20120061806	Pub Dt:	03/15/2012
Title:	SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE

Patent #:	8739429	Issue Dt:	06/03/2014	Application #:	13633843	Filing Dt:	10/02/2012
Publication #:	US20130167393	Pub Dt:	07/04/2013
Title:	SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE

Patent #:	9305768	Issue Dt:	04/05/2016	Application #:	13686697	Filing Dt:	11/27/2012
Publication #:	US20130333723	Pub Dt:	12/19/2013
Title:	METHOD FOR PROCESSING FLAT ARTICLES

Patent #:	9049520	Issue Dt:	06/02/2015	Application #:	14281829	Filing Dt:	05/19/2014
Publication #:	US20140254325	Pub Dt:	09/11/2014
Title:	COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME

Patent #:	9337065	Issue Dt:	05/10/2016	Application #:	14294742	Filing Dt:	06/03/2014
Publication #:	US20140283884	Pub Dt:	09/25/2014
Title:	SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE

Patent #:	10079164	Issue Dt:	09/18/2018	Application #:	14490080	Filing Dt:	09/18/2014
Publication #:	US20150075562	Pub Dt:	03/19/2015
Title:	SYSTEM, APPARATUS, AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY

Patent #:	10170350	Issue Dt:	01/01/2019	Application #:	14703459	Filing Dt:	05/04/2015
Publication #:	US20150318224	Pub Dt:	11/05/2015
Title:	CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES

Patent #:	9987666	Issue Dt:	06/05/2018	Application #:	14727116	Filing Dt:	06/01/2015
Publication #:	US20150258583	Pub Dt:	09/17/2015
Title:	COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAME

Patent #:	10181405	Issue Dt:	01/15/2019	Application #:	15240451	Filing Dt:	08/18/2016
Publication #:	US20160358785	Pub Dt:	12/08/2016
Title:	METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICON

Patent #:	10607864	Issue Dt:	03/31/2020	Application #:	16107525	Filing Dt:	08/21/2018
Publication #:	US20190006205	Pub Dt:	01/03/2019
Title:	SYSTEM, APPARATUS, AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY

Patent #:	10991589	Issue Dt:	04/27/2021	Application #:	16237302	Filing Dt:	12/31/2018
Publication #:	US20190148193	Pub Dt:	05/16/2019
Title:	CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES

Patent #:	NONE	Issue Dt:		Application #:	17209299	Filing Dt:	03/23/2021
Publication #:	US20210210352	Pub Dt:	07/08/2021
Title:	CORRELATION BETWEEN CONDUCTIVITY AND PH MEASUREMENTS FOR KOH TEXTURING SOLUTIONS AND ADDITIVES

Assignor

NAURA AKRION INC.

Exec Dt:

05/17/2022

Assignee

AKRION TECHNOLOGIES INC.

6330 HEDGEWOOD DR., SUITE 150

ALLENTOWN, PENNSYLVANIA 18106

Correspondence name and address
	THE BELLES GROUP, P.C.
	1800 JOHN F. KENNEDY BLVD
	SUITE 1010
	PHILADELPHIA, PA 19103

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