Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2018
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Application #:
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15273631
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Filing Dt:
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09/22/2016
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Publication #:
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Pub Dt:
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03/22/2018
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Inventors:
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Young-Jin Choi, Su Ho Cho, Beomsoo Park, Fei Peng, Soo Young Choi
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Title:
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METHODS AND APPARATUS FOR PROCESSING CHAMBER CLEANING END POINT DETECTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BRIAN M. DUGAN, DUGAN & DUGAN, PC |
| 245 SAW MILL RIVER ROAD |
| SUITE 309 |
| HAWTHORNE, NY 10532 |
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