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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/07/2018
Application #:
14539206
Filing Dt:
11/12/2014
Publication #:
Pub Dt:
05/14/2015
Inventors:
Miyako KANEKO, Keiji Tanouchi, Itaru Kanno, Takehiko Orii
Title:
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY MEDIUM
Assignment: 1
Reel/Frame:
034157/0520Recorded: 11/12/2014Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/30/2014
Exec Dt:
10/30/2014
Exec Dt:
10/30/2014
Exec Dt:
11/04/2014
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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