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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10053773
Issue Dt:
08/21/2018
Application #:
14635978
Filing Dt:
03/02/2015
Publication #:
20150247235
Pub Dt:
09/03/2015
Inventors:
Mitsuru HASHIMOTO, Eiichi NISHIMURA, Hiroki KISHI, Keiichi SHIMODA, Akitaka SHIMIZU
Title:
METHOD OF CLEANING PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
035070/0221Recorded: 03/02/2015Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KISHI, HIROKI
Exec Dt:
02/19/2015
HASHIMOTO, MITSURU
Exec Dt:
02/19/2015
SHIMODA, KEIICHI
Exec Dt:
02/21/2015
NISHIMURA, EIICHI
Exec Dt:
02/19/2015
SHIMIZU, AKITAKA
Exec Dt:
02/23/2015
Assignee:
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
ROTHWELL, FIGG, ERNST & MANBECK, P.C.
607 14TH STREET, N.W.
SUITE 800
WASHINGTON, DC 20005

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