Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/18/2018
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Application #:
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15315878
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Filing Dt:
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12/02/2016
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Publication #:
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Pub Dt:
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03/30/2017
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Inventors:
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Deokkyun D. YOON, Chinedum E. OKWUDIRE
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Title:
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MAGNET ASSISTED STAGE FOR VIBRATION AND HEAT REDUCTION IN WAFER SCANNING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1600 HURON PARKWAY, 2ND FLOOR |
| ANN ARBOR, MICHIGAN 48109-2590 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| STANLEY M. ERJAVAC |
| BLOOMFIELD HILLS, MI 48303 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OFFICE OF TECHNOLOGY TRANSFER |
| 1600 HURON PARKWAY, 2ND FLOOR |
| ANN ARBOR, MICHIGAN 48109-2590 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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