Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/25/2018
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Application #:
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15283286
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Filing Dt:
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09/30/2016
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Publication #:
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Pub Dt:
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02/01/2018
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Inventors:
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Yun Cao, Huan Kan, Fang Wei, Jun Zhu, Yukun Lv, Xusheng Zhang
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Title:
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SIMULATION METHOD OF CMP PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 497 GAOSI ROAD, ZHANGJIANG HI-TECH PARK |
| SHANGHAI, CHINA 201210 |
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| TIANCHEN LLC |
| 3302 TOWER 1, NO.388 ZHONGJIANG ROAD, PUTUO |
| SHANGHAI, 200062 CHINA |
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