Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/25/2018
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Application #:
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15187717
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Filing Dt:
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06/20/2016
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Publication #:
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Pub Dt:
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12/21/2017
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Inventors:
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Kartik Ramaswamy, Robert Paul Meagley, Leonard Tedeschi, Daniel Thomas McCormick
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Title:
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WAFER PROCESSING EQUIPMENT HAVING CAPACITIVE MICRO SENSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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TRAVIS R. YRIBARREN |
1279 OAKMEAD PARKWAY |
SUNNYVALE, CA 94085-4040 |
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