Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/02/2018
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Application #:
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15255255
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Filing Dt:
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09/02/2016
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Publication #:
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Pub Dt:
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03/09/2017
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Inventor:
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Shifang Li
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Title:
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METHOD OF IMPROVING LATERAL RESOLUTION FOR HEIGHT SENSOR USING DIFFERENTIAL DETECTION TECHNOLOGY FOR SEMICONDUCTOR INSPECTION AND METROLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| KLA-TENCOR CORPORATION / HODGSON RUSS LL |
| THE GUARANTY BUILDING |
| 140 PEARL STREET, SUITE 100 |
| BUFFALO, NY 14202-4040 |
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