Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/02/2018
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Application #:
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13687492
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Filing Dt:
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11/28/2012
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Publication #:
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Pub Dt:
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05/29/2014
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Inventors:
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Jiann Lih WU, Soon-Kang HUANG, Jeng-Jyi HWANG, Chi-Ming YANG
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Title:
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MULTI-POINT CHEMICAL MECHANICAL POLISHING END POINT DETECTION SYSTEM AND METHOD OF USING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. VI |
| HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300 |
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| LOWE HAUPTMAN HAM & BERNER, LLP (TSMC) |
| 2318 MILL ROAD |
| SUITE 1400 |
| ALEXANDRIA, VA 22314 |
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