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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
10100407
Issue Dt:
10/16/2018
Application #:
14578166
Filing Dt:
12/19/2014
Publication #:
20160177443
Pub Dt:
06/23/2016
Inventors:
Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale, Jun Qian et al
Title:
HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT
Assignment: 1
Reel/Frame:
036654/0940Recorded: 09/25/2015Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KUMAR, PURUSHOTTAM
Exec Dt:
08/06/2015
KANG, HU
Exec Dt:
08/06/2015
LAVOIE, ADRIEN
Exec Dt:
08/06/2015
PASQUALE, FRANK L.
Exec Dt:
08/06/2015
QIAN, JUN
Exec Dt:
08/07/2015
BALDASSERONI, CHLOE
Exec Dt:
08/10/2015
SWAMINATHAN, SHANKAR
Exec Dt:
08/10/2015
LEESER, KARL F.
Exec Dt:
08/10/2015
SMITH, DAVID CHARLES
Exec Dt:
08/06/2015
CHIU, YI CHUNG
Exec Dt:
03/05/2015
LAI, WEI-CHIH
Exec Dt:
03/05/2015
Assignee:
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
WEAVER AUSTIN VILLENEUVE & SAMPSON LLP
P.O. BOX 70250
OAKLAND, CA 94612

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